Epitaxial growth of high-quality Mg x Zn 1-xO films by a plasma-assisted reactive evaporation method using ZnMg alloys as a source material

T. Abe*, A. Nakagawa, M. Tanaka, M. Nakagawa, H. Endo, K. Meguro, Y. Kashiwaba, S. Chiba, T. Ojima, K. Aota, S. Takahashi, M. Daibo, H. Osada, T. Fujiwara, K. Yamaguchi, I. Niikura, Y. Kashiwaba

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Epitaxial growth of high-quality Mg x Zn 1-xO films on Zn faces of single crystal ZnO substrates was achieved by a plasma-assisted reactive evaporation method using ZnMg alloys. The composition of Mg of Mg x Zn 1-xO films grown by using this method strongly depended on the composition of Mg of ZnMg alloys. Mg composition of Mg x Zn 1-xO films increased with increase in the composition of Mg of ZnMg alloys with 7.5-30 wt%. The maximum value of (x) of the Mg x Zn 1-xO films was 0.24. The peak position of XRD from Mg x Zn 1-xO (0002) of a wurtzite structure shifted to a high angle with increase of Mg composition of Mg x Zn 1-xO films. The full-width at half-maximum value of the XRD pattern of ω scans of Mg 0.17Zn0 0.83O (0002) was 40 arcsec. The root mean square roughness of the surface of Mg x Zn 1-xO films was 1.0 nm or less, and flat terraces and steps with a height of two monolayers were observed. Room temperature photoluminescence spectra of Mg x Zn 1-xO films showed a strong near band-edge (NBE) emission and very weak emission in visible regions. The peak of NBE emissions of Mg x Zn 1-xO films shifted to higher energy with increase of Mg composition of Mg x Zn 1-x O films. The band-gap energy estimated from reflectance spectra increased from 3.38 to 3.83 eV with increase of composition (x) of Mg x Zn 1-xO films from 0.01 to 0.24. This new growth method is useful for preparation of devices based on ZnO and its related compounds.

Original languageEnglish
Pages (from-to)1813-1816
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Volume9
Issue number8-9
DOIs
Publication statusPublished - 2012 Aug
Externally publishedYes

Keywords

  • MgZnO
  • Plasma-assist
  • ZnMg alloy
  • ZnO

ASJC Scopus subject areas

  • Condensed Matter Physics

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