Epitaxial piezoelectric layer SMR fabricated using epitaxial sacrificial layer process

Shinya Kudo, Satoshi Tokai, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Single crystalline piezoelectric layer is expected to possess higher power durability and Q factor than polycrystalline because the dielectric and mechanical loss increases due to the grain boundary. In this study, we introduce a method to fabricate epitaxial piezoelectric layer on acoustic Bragg reflector using wet etching of epitaxial sacrificial layer. First, (0001) ZnO epitaxial films were grown on epitaxial (111) Au / (111) Pt / (0001) sapphire substrate by magnetron sputtering. Next, the polycrystalline Pt bottom electrode and the acoustic Bragg reflector based on 2 pairs of SiO2 / Mo were deposited on ZnO epitaxial films. After etching Au epitaxial sacrificial layer, SMR based on Au / epitaxial ZnO / Pt / Bragg reflector were fabricated. The crystallinity of epitaxial layers was determined by X-ray diffraction. FWHM values of the ω-scan rocking curves of Pt, Au and ZnO were determined as 0.25°, 0.27° and 0.80°, respectively. Moreover, six symmetry was clearly observed in Pt, Au and ZnO epitaxial layers. Real part of impedance characteristics of resonator was measured by a network analyzer. Resonance peak was observed at 1.3 GHz.

Original languageEnglish
Title of host publicationIEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages86-89
Number of pages4
ISBN (Electronic)9781665468312
DOIs
Publication statusPublished - 2022
Externally publishedYes
Event1st IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022 - Munich, Germany
Duration: 2022 Jul 182022 Jul 20

Publication series

NameIEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022

Conference

Conference1st IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
Country/TerritoryGermany
CityMunich
Period22/7/1822/7/20

Keywords

  • BAW
  • Epitaxial growth
  • SMR

ASJC Scopus subject areas

  • Computational Mechanics
  • Electrical and Electronic Engineering
  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials
  • Acoustics and Ultrasonics

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