Estimation of phonon mean free path in small-scaled Si wire by monte carlo simulation

Yuhei Suzuki, Yuma Fujita, Khotimatul Fauziah, Takuto Nogita, Hiroya Ikeda, Takanobu Watanabe, Yoshinari Kamakura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A phonon transport in Si wire structures were simulated based on a Monte Carlo method to clarify the influence of the wire geometry and the surface roughness on thermal conductivity and the phonon-drag component of Seebeck coefficient. The mean free path (MFP) spectrum was estimated by tracing the simulated phonons. The MFPs of 1 THz phonons which mainly contribute to Seebeck coefficient become shorter with a decrease of the wire width for rough surfaces. This agrees with experimental observation of Seebeck coefficient. The MFPs of 3 THz phonons which mainly contribute to thermal conductivity were influenced even by small-roughness surfaces.

Original languageEnglish
Title of host publication2020 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages15-18
Number of pages4
ISBN (Electronic)9784863487635
DOIs
Publication statusPublished - 2020 Sep 23
Event2020 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2020 - Virtual, Kobe, Japan
Duration: 2020 Sep 32020 Oct 6

Publication series

NameInternational Conference on Simulation of Semiconductor Processes and Devices, SISPAD
Volume2020-September

Conference

Conference2020 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2020
Country/TerritoryJapan
CityVirtual, Kobe
Period20/9/320/10/6

Keywords

  • Monte Carlo simulation
  • Phonon
  • Si

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Computer Science Applications
  • Modelling and Simulation

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