ATF2 is the final focus test facility for ILC to realize and demonstrate nanometer focusing. One of the goals of the ATF2 is a demonstration of a compact final focus system based on the local chromaticity correction. A designed beam size at the focal point is to be 37 nm in vertical. To achieve the goal, a beam size monitor capable of nanometer beam size measurement is inevitably needed. Shintake monitor satisfies the demands, and is installed at the virtual interaction point of the ATF2. Shintake monitor is a beam size monitor which uses laser interference fringe pattern to measure beam size. The beam test for the Shintake monitor was successful in measurement of signal modulation with the laser interference fringe pattern in November 2009. In April 2010, beam size of less than 1μm was achieved. We have studied the error sources, and evaluated the total error to be less than 10% for 1 minute measurement. This paper is about the evaluation of the Shintake monitor performance by analyzing beam tests data. Most systematic error sources are well understood, so that we can estimate accuracy of beam size measurement when the beam size reaches 37 nm.