Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator

Ryunosuke Gando, Naofumi Nakamura, Yumi Hayashi, Daiki Ono, Kei Masunishi, Yasushi Tomizawa, Hiroaki Yamazaki, Tamio Ikehashi, Yoshiaki Sugizaki, Hideki Shibata

Research output: Contribution to journalConference article

Abstract

We present a practical method to evaluate gas permeability for thin polymer films using an encapsulated micro-electro-mechanical-system (MEMS) oscillator. Previously, we have developed a hermetic thin-film dome structure for RF-MEMS tunable capacitor, using conventional back-end-of-the-line (BEOL) processes. The dome is made of multiple layers including a polymer film, whose gas permeability is an important factor with respect to productivity and reliability. So far, it had been difficult to evaluate the gas permeability for such small and thin polymer films with sub-millimeter diameter and micron-scale thickness. In this evaluation method, the pressure dependence of air-damping oscillation is used to measure the permeability. As a demonstration, we carried out a permeability measurement of a 0.5-mm-diameter dome sealed with a thin (1 μm) polymer film. The resulting permeability coefficient is found to be 1× 10-16 mol/m/Pa/s, at room temperature.

Original languageEnglish
Article number6985164
Pages (from-to)970-973
Number of pages4
JournalProceedings of IEEE Sensors
Volume2014-December
Issue numberDecember
DOIs
Publication statusPublished - 2014 Dec 12
Externally publishedYes
Event13th IEEE SENSORS Conference, SENSORS 2014 - Valencia, Spain
Duration: 2014 Nov 22014 Nov 5

Fingerprint

Gas permeability
Polymer films
Domes
Thin films
Hydraulic conductivity
Capacitors
Demonstrations
Damping
Productivity
Air
Temperature

Keywords

  • Damping oscillation
  • Gas permeability
  • MEMS
  • Polymer film
  • Quality factotr

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Gando, R., Nakamura, N., Hayashi, Y., Ono, D., Masunishi, K., Tomizawa, Y., ... Shibata, H. (2014). Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator. Proceedings of IEEE Sensors, 2014-December(December), 970-973. [6985164]. https://doi.org/10.1109/ICSENS.2014.6985164

Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator. / Gando, Ryunosuke; Nakamura, Naofumi; Hayashi, Yumi; Ono, Daiki; Masunishi, Kei; Tomizawa, Yasushi; Yamazaki, Hiroaki; Ikehashi, Tamio; Sugizaki, Yoshiaki; Shibata, Hideki.

In: Proceedings of IEEE Sensors, Vol. 2014-December, No. December, 6985164, 12.12.2014, p. 970-973.

Research output: Contribution to journalConference article

Gando, R, Nakamura, N, Hayashi, Y, Ono, D, Masunishi, K, Tomizawa, Y, Yamazaki, H, Ikehashi, T, Sugizaki, Y & Shibata, H 2014, 'Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator', Proceedings of IEEE Sensors, vol. 2014-December, no. December, 6985164, pp. 970-973. https://doi.org/10.1109/ICSENS.2014.6985164
Gando R, Nakamura N, Hayashi Y, Ono D, Masunishi K, Tomizawa Y et al. Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator. Proceedings of IEEE Sensors. 2014 Dec 12;2014-December(December):970-973. 6985164. https://doi.org/10.1109/ICSENS.2014.6985164
Gando, Ryunosuke ; Nakamura, Naofumi ; Hayashi, Yumi ; Ono, Daiki ; Masunishi, Kei ; Tomizawa, Yasushi ; Yamazaki, Hiroaki ; Ikehashi, Tamio ; Sugizaki, Yoshiaki ; Shibata, Hideki. / Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator. In: Proceedings of IEEE Sensors. 2014 ; Vol. 2014-December, No. December. pp. 970-973.
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