Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator

Ryunosuke Gando, Naofumi Nakamura, Yumi Hayashi, Daiki Ono, Kei Masunishi, Yasushi Tomizawa, Hiroaki Yamazaki, Tamio Ikehashi, Yoshiaki Sugizaki, Hideki Shibata

Research output: Contribution to journalConference articlepeer-review


We present a practical method to evaluate gas permeability for thin polymer films using an encapsulated micro-electro-mechanical-system (MEMS) oscillator. Previously, we have developed a hermetic thin-film dome structure for RF-MEMS tunable capacitor, using conventional back-end-of-the-line (BEOL) processes. The dome is made of multiple layers including a polymer film, whose gas permeability is an important factor with respect to productivity and reliability. So far, it had been difficult to evaluate the gas permeability for such small and thin polymer films with sub-millimeter diameter and micron-scale thickness. In this evaluation method, the pressure dependence of air-damping oscillation is used to measure the permeability. As a demonstration, we carried out a permeability measurement of a 0.5-mm-diameter dome sealed with a thin (1 μm) polymer film. The resulting permeability coefficient is found to be 1× 10-16 mol/m/Pa/s, at room temperature.

Original languageEnglish
Article number6985164
Pages (from-to)970-973
Number of pages4
JournalProceedings of IEEE Sensors
Issue numberDecember
Publication statusPublished - 2014 Dec 12
Externally publishedYes
Event13th IEEE SENSORS Conference, SENSORS 2014 - Valencia, Spain
Duration: 2014 Nov 22014 Nov 5


  • Damping oscillation
  • Gas permeability
  • MEMS
  • Polymer film
  • Quality factotr

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


Dive into the research topics of 'Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator'. Together they form a unique fingerprint.

Cite this