Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator

Ryunosuke Gando; Naofumi Nakamura; Yumi Hayashi; Daiki Ono; Kei Masunishi; Yasushi Tomizawa; Hiroaki Yamazaki; Tamio Ikehashi; Yoshiaki Sugizaki; Hideki Shibata

doi:10.1109/ICSENS.2014.6985164

Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator

Ryunosuke Gando, Naofumi Nakamura, Yumi Hayashi, Daiki Ono, Kei Masunishi, Yasushi Tomizawa, Hiroaki Yamazaki, Tamio Ikehashi, Yoshiaki Sugizaki, Hideki Shibata

Research output: Contribution to journal › Conference article › peer-review

Abstract

We present a practical method to evaluate gas permeability for thin polymer films using an encapsulated micro-electro-mechanical-system (MEMS) oscillator. Previously, we have developed a hermetic thin-film dome structure for RF-MEMS tunable capacitor, using conventional back-end-of-the-line (BEOL) processes. The dome is made of multiple layers including a polymer film, whose gas permeability is an important factor with respect to productivity and reliability. So far, it had been difficult to evaluate the gas permeability for such small and thin polymer films with sub-millimeter diameter and micron-scale thickness. In this evaluation method, the pressure dependence of air-damping oscillation is used to measure the permeability. As a demonstration, we carried out a permeability measurement of a 0.5-mm-diameter dome sealed with a thin (1 μm) polymer film. The resulting permeability coefficient is found to be 1× 10^-16 mol/m/Pa/s, at room temperature.

Original language	English
Article number	6985164
Pages (from-to)	970-973
Number of pages	4
Journal	Proceedings of IEEE Sensors
Volume	2014-December
Issue number	December
DOIs	https://doi.org/10.1109/ICSENS.2014.6985164
Publication status	Published - 2014 Dec 12
Externally published	Yes
Event	13th IEEE SENSORS Conference, SENSORS 2014 - Valencia, Spain Duration: 2014 Nov 2 → 2014 Nov 5

Keywords

Damping oscillation
Gas permeability
MEMS
Polymer film
Quality factotr

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1109/ICSENS.2014.6985164

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title = "Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator",

abstract = "We present a practical method to evaluate gas permeability for thin polymer films using an encapsulated micro-electro-mechanical-system (MEMS) oscillator. Previously, we have developed a hermetic thin-film dome structure for RF-MEMS tunable capacitor, using conventional back-end-of-the-line (BEOL) processes. The dome is made of multiple layers including a polymer film, whose gas permeability is an important factor with respect to productivity and reliability. So far, it had been difficult to evaluate the gas permeability for such small and thin polymer films with sub-millimeter diameter and micron-scale thickness. In this evaluation method, the pressure dependence of air-damping oscillation is used to measure the permeability. As a demonstration, we carried out a permeability measurement of a 0.5-mm-diameter dome sealed with a thin (1 μm) polymer film. The resulting permeability coefficient is found to be 1× 10-16 mol/m/Pa/s, at room temperature.",

keywords = "Damping oscillation, Gas permeability, MEMS, Polymer film, Quality factotr",

author = "Ryunosuke Gando and Naofumi Nakamura and Yumi Hayashi and Daiki Ono and Kei Masunishi and Yasushi Tomizawa and Hiroaki Yamazaki and Tamio Ikehashi and Yoshiaki Sugizaki and Hideki Shibata",

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doi = "10.1109/ICSENS.2014.6985164",

language = "English",

volume = "2014-December",

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T1 - Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator

AU - Gando, Ryunosuke

AU - Nakamura, Naofumi

AU - Hayashi, Yumi

AU - Ono, Daiki

AU - Masunishi, Kei

AU - Tomizawa, Yasushi

AU - Yamazaki, Hiroaki

AU - Ikehashi, Tamio

AU - Sugizaki, Yoshiaki

AU - Shibata, Hideki

PY - 2014/12/12

Y1 - 2014/12/12

N2 - We present a practical method to evaluate gas permeability for thin polymer films using an encapsulated micro-electro-mechanical-system (MEMS) oscillator. Previously, we have developed a hermetic thin-film dome structure for RF-MEMS tunable capacitor, using conventional back-end-of-the-line (BEOL) processes. The dome is made of multiple layers including a polymer film, whose gas permeability is an important factor with respect to productivity and reliability. So far, it had been difficult to evaluate the gas permeability for such small and thin polymer films with sub-millimeter diameter and micron-scale thickness. In this evaluation method, the pressure dependence of air-damping oscillation is used to measure the permeability. As a demonstration, we carried out a permeability measurement of a 0.5-mm-diameter dome sealed with a thin (1 μm) polymer film. The resulting permeability coefficient is found to be 1× 10-16 mol/m/Pa/s, at room temperature.

AB - We present a practical method to evaluate gas permeability for thin polymer films using an encapsulated micro-electro-mechanical-system (MEMS) oscillator. Previously, we have developed a hermetic thin-film dome structure for RF-MEMS tunable capacitor, using conventional back-end-of-the-line (BEOL) processes. The dome is made of multiple layers including a polymer film, whose gas permeability is an important factor with respect to productivity and reliability. So far, it had been difficult to evaluate the gas permeability for such small and thin polymer films with sub-millimeter diameter and micron-scale thickness. In this evaluation method, the pressure dependence of air-damping oscillation is used to measure the permeability. As a demonstration, we carried out a permeability measurement of a 0.5-mm-diameter dome sealed with a thin (1 μm) polymer film. The resulting permeability coefficient is found to be 1× 10-16 mol/m/Pa/s, at room temperature.

KW - Damping oscillation

KW - Gas permeability

KW - MEMS

KW - Polymer film

KW - Quality factotr

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Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator

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Keywords

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