Evaluation of gas permeability for micro-scale thin polymer film with encapsulated MEMS damped oscillator

Ryunosuke Gando, Naofumi Nakamura, Yumi Hayashi, Daiki Ono, Kei Masunishi, Yasushi Tomizawa, Hiroaki Yamazaki, Tamio Ikehashi, Yoshiaki Sugizaki, Hideki Shibata

Research output: Contribution to journalConference articlepeer-review

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Engineering & Materials Science