Evaluation of new ozone generator designed for oxide film formatio by molecular beam epitaxy method

Shingo Ichimura, S. Hosokawa, H. N. Nonaka, K. Arai

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

The quality of ozone vapor produced with a new ozone generator was evaluated. The ozone vapor was produced by evaporation of liquid ozone after accumulating it in a ozone vessel at various temperatures between 75 and 95 K. Mass analysis of the ozone vapor revealed that the purity of ozone in the vapor depended on both the ozone vessel temperature during liquefaction and that during evaporation. The purity was — 70% when liquid ozone accumulation temperatures higher than 90 K were used. The activity of the ozone vapor was investigated by oxidation of a Cu foil under low pressure condition. The formation of a CuO layer by exposure to the ozone vapor (pressure: ~5X 10-4Pa) at 300°C was confirmed through x-ray photoelectron spectroscopy analysis.

Original languageEnglish
Pages (from-to)2369-2373
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume9
Issue number4
DOIs
Publication statusPublished - 1991 Jan 1
Externally publishedYes

Fingerprint

Ozone
Molecular beam epitaxy
ozone
Oxide films
oxide films
molecular beam epitaxy
generators
evaluation
Vapors
vapors
vessels
Evaporation
purity
evaporation
liquefaction
Gas generators
Liquids
Liquefaction
Photoelectron spectroscopy
liquids

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Evaluation of new ozone generator designed for oxide film formatio by molecular beam epitaxy method. / Ichimura, Shingo; Hosokawa, S.; Nonaka, H. N.; Arai, K.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 9, No. 4, 01.01.1991, p. 2369-2373.

Research output: Contribution to journalArticle

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