Evaluation of organic monolayers formed on Si(111)

Exploring the possibilities for application in electron beam nanoscale patterning

Taro Yamada, Nao Takano, Keiko Yamada, Shuhei Yoshitomi, Tomoyuki Inoue, Tetsuya Osaka

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

The methods of preparing organic monolayers on Si(111), the effects of electron-beam irradiation onto these monolayers, and the deposition of metal atoms over the irradiated areas have been investigated in order to develop a process of mass-scale production of nanometer-scale patterns on Si(111) wafer surfaces. The organic monolayers were fabricated on hydrogen-terminated Si(111) wafer surfaces using previously reported methods for the electrolysis of para-substituted benzenediazonium salts and the Grignard reaction with various alkyl moieties and reaction procedures. Using these electrolysis methods, partially well-defined two-dimensional monolayers were formed, which were, however, obscured by precipitated by-products. The Grignard reaction deposited homogeneous monolayer moieties of alkyl groups which were randomly arranged and are suitable for surface passivation. Electron-beam bombardment of the organic monolayers on Si(111) was performed in an atmosphere of O2 or H2O. The bombarded area was effectively oxidized in a well-controlled manner. By immersing the bombarded specimen into an aqueous NiSO4 + (NH4)2SO4 solution, Ni was selectively impregnated only within the area of electron bombardment. Based on these results, application of organic monolayers for fabricating nanometer-scale monolayer patterns is proposed.

Original languageEnglish
Pages (from-to)4845-4853
Number of pages9
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume40
Issue number8
Publication statusPublished - 2001 Aug

Fingerprint

Grignard reactions
Electron beams
Monolayers
electron beams
electrolysis
evaluation
wafers
electron bombardment
passivity
bombardment
Electrolysis
salts
atmospheres
irradiation
hydrogen
metals
atoms
Passivation
Byproducts
Irradiation

Keywords

  • Diazonium electrolysis
  • Electron-beam patterning
  • Grignard reaction
  • Hydrogen-terminated Si(111)
  • Metal impregnation
  • Nanometer-scale fabrication
  • Organic monolayer

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Evaluation of organic monolayers formed on Si(111) : Exploring the possibilities for application in electron beam nanoscale patterning. / Yamada, Taro; Takano, Nao; Yamada, Keiko; Yoshitomi, Shuhei; Inoue, Tomoyuki; Osaka, Tetsuya.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 40, No. 8, 08.2001, p. 4845-4853.

Research output: Contribution to journalArticle

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