Evaluation of UV roller imprinting using replicated fluorinated film molds

T. Shibazaki, L. Li, H. Shinohara, S. Shoji, J. Mizuno, K. Tsunozaki, Y. Kawaguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, a fluorinated UV-curable resin was replicated by UV imprinting and used as a film mold. The film mold was fabricated by anti-sticking process (ACP). A remarkable advantage of the application for easy mold fabrication is expected, because it uses only UV imprinting. We evaluated two types of the pattern replications, directions between the stage movement and line and space (L&S) patterns in perpendicular as well as in parallel. The results of replication tests show obvious difference between UV roller imprinting and UV roller press imprinting. In addition, Vickers hardness is measured to evaluate the thermal property of UV roller imprinting. The results indicate that temperature is effective not only to improve pattern replication, but also to accelerate UV curing.

Original languageEnglish
Title of host publicationNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages1254-1257
Number of pages4
DOIs
Publication statusPublished - 2011 Oct 4
Event6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan, Province of China
Duration: 2011 Feb 202011 Feb 23

Publication series

NameNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
CountryTaiwan, Province of China
CityKaohsiung
Period11/2/2011/2/23

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Keywords

  • UV roller imprinting
  • UV roller press imprinting
  • effect of heat
  • fluorinated UV-curable resin
  • stage direction of movement

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Shibazaki, T., Li, L., Shinohara, H., Shoji, S., Mizuno, J., Tsunozaki, K., & Kawaguchi, Y. (2011). Evaluation of UV roller imprinting using replicated fluorinated film molds. In NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 1254-1257). [6017585] (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). https://doi.org/10.1109/NEMS.2011.6017585