Evaluation of vacancies in positive-tone non-chemically and chemically amplified euv / eb resists ∼ relationship between free-volume and LER ∼

Akihiro Oshima, Toru Hinata, Hirotaka Nakamura, Toshitaka Oka, Nagayasu Oshima, Brian E. O'Rourke, Ryoichi Suzuki, Masakazu Washio, Seiichi Tagawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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