Evolution of growth characteristics around the junction in the mosaic diamond

Xiaohua Zhu, Jinlong Liu*, Siwu Shao, Juping Tu, Yabo Huang, Te Bi, Liangxian Chen, Junjun Wei, Hiroshi Kawarada, Chengming Li

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

In order to realize the practical use of diamond as a semiconductor material, large-area single-crystal diamond wafers with uniform quality are required. Mosaic growth is an effective method to produce inch-grade single-crystal diamonds. However, the quality of the wafer is limited by the junction interface seriously, because cracking occurs easily due to the high internal stress. In this paper, the repetition growth method was adopted to grow mosaic splicing single-crystal diamond without polycrystalline diamond interface. The high-quality single crystal diamond slices were reduplicated by microwave plasma chemical vapor deposition (MPCVD). The substrates were obtained by cutting a piece of CVD diamond along a plane perpendicular to 〈001〉 (with a (100)-oriented surface). The evolution of the growth characteristics around the junction of the substrates at different stages was studied. The results show that the surface of the epitaxial layers gradually evolves from blurry terraces to a regular well-ordered step flow. When the substrates have the same deviation direction and the off-direction angles are within 3°, the junction of the substrates can connect smoothly. Raman mapping shows that there is a mixture of tensile stress and compressive stress near the junction. As the thickness of the epitaxial layer increases from 280 μm to 560 μm, the range of tensile stress near the joint area expands from 85 μm to 150 μm, the maximum tensile stress increases from 0.08 GPa to 0.16 GPa. In addition, the value of FWHM in the X-ray rocking curve is less than 2.80 cm−1 around the junction, which indicates good crystal quality.

Original languageEnglish
Article number108640
JournalDiamond and Related Materials
Volume120
DOIs
Publication statusPublished - 2021 Dec

Keywords

  • Epitaxial growth
  • Junction
  • Mosaic diamond
  • Stress

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Evolution of growth characteristics around the junction in the mosaic diamond'. Together they form a unique fingerprint.

Cite this