Experimental and theoretical investigation of kt2and mechanical quality factor Qm in YbAlN films using DFT

Naoya Iwata, Sarina Kinoshita, Junjun Jia, Masashi Suzuki, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the RF filter, both high kt2and high Qm are required. Now AlN films are used in the BAW filters because of high Qm, but AlN has low kt2• Our group previously found the enhancement of kt2 in YbAlN films [1] and reported theoretical prediction of k332 in YbxAl1-xN for the range of x=0 to 11 % [2]. In this study, we report the theoretical prediction of characteristic in YbxAl1-xN for the range of x=16.7 to 33% Furthermore, we estimate the experimental mechanical quality factor Qm of the YbAlN thin film. As a result, when Yb atomic concentration is 33%, the k332 of YbAlN is predicted to be 22%. It is approximately 3 times that of pure AlN. It was also confirmed that the Qm decreased with doping Yb.

Original languageEnglish
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
Publication statusPublished - 2020 Sep 7
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: 2020 Sep 72020 Sep 11

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas
Period20/9/720/9/11

Keywords

  • BAW filter
  • YbAlN

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Fingerprint Dive into the research topics of 'Experimental and theoretical investigation of kt2and mechanical quality factor Qm in YbAlN films using DFT'. Together they form a unique fingerprint.

Cite this