Experimental observations on the crystalline structures of YAlO<inf>3</inf> single crystal at high temperatures

Takahiro Inoue, Takaaki Morimoto, Yoshimichi Ohki

    Research output: Contribution to journalArticle

    2 Citations (Scopus)

    Abstract

    To understand the effects of thermal annealing on a high-permittivity gate insulating material YAlO<inf>3</inf>, its single crystal was annealed at various high temperatures ranging from 900 to 1300 °C and was examined by various instrumental analyses such as X-ray diffraction, infrared absorption spectroscopy, laser confocal microscopy, and atomic force microscopy. As a result, it was clarified that the crystalline YAlO<inf>3</inf> takes at least three structures in a temperature range up to 1300 °C. Namely, it is perovskite below 1160 °C, at which the garnet structure starts to appear, while an unknown structure appears at 1250 °C. On the other hand, the sample surface also shows drastic changes if the temperature exceeds 1160 °C. Furthermore, many elliptical spots are induced after the annealing at 1200 or 1250 °C. Moreover, hydroxyl groups are generated at 1300 °C. It is desirable to take these structural changes into account in determining the annealing temperature of YAlO<inf>3</inf> for various industrial purposes such as the manufacture of semiconductor devices.

    Original languageEnglish
    Pages (from-to)1423-1429
    Number of pages7
    JournalApplied Physics A: Materials Science and Processing
    Volume119
    Issue number4
    DOIs
    Publication statusPublished - 2015 Jun 1

    Fingerprint

    Single crystals
    Crystalline materials
    Annealing
    Temperature
    Insulating materials
    Confocal microscopy
    Garnets
    Infrared absorption
    Semiconductor devices
    Absorption spectroscopy
    Hydroxyl Radical
    Perovskite
    Infrared spectroscopy
    Atomic force microscopy
    Permittivity
    X ray diffraction
    Lasers
    Hot Temperature
    perovskite

    ASJC Scopus subject areas

    • Materials Science(all)
    • Chemistry(all)

    Cite this

    Experimental observations on the crystalline structures of YAlO<inf>3</inf> single crystal at high temperatures. / Inoue, Takahiro; Morimoto, Takaaki; Ohki, Yoshimichi.

    In: Applied Physics A: Materials Science and Processing, Vol. 119, No. 4, 01.06.2015, p. 1423-1429.

    Research output: Contribution to journalArticle

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