Extendibility of proximity x-ray lithography to 25 nm and below

Eijiro Toyota, Masakazu Washio

Research output: Contribution to journalArticle

13 Citations (Scopus)

Fingerprint Dive into the research topics of 'Extendibility of proximity x-ray lithography to 25 nm and below'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science