Extraction of kt2 of piezoelectric film/substrate structure by conversion loss derived by electromagnetic signal including no acoustic losses

Ryota Tatsumi, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Electromechanical coupling coefficient (kt2) is an important parameter for determining the performances of RF BAW filters. According to the IEEE standard, the resonance-antiresonance method for a self-standing film structure is recommended to determine kt2 of the piezoelectric film. It is convenient and cost-effective to determine the kt2 from the film/wafer structure or epitaxial wafers. However, kt2 is underestimated due to the acoustic losses in the substrate in the conventional conversion loss method, which is powerful tool to extract the kt2 from HBAR. In this study, we introduce the conversion loss using electromagnetic signal including no acoustic losses.

Original languageEnglish
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
Publication statusPublished - 2020 Sep 7
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: 2020 Sep 72020 Sep 11

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
Country/TerritoryUnited States
CityLas Vegas
Period20/9/720/9/11

Keywords

  • Electromechanical coupling coefficient
  • HBAR
  • Piezoelectric film
  • Resonant frequency

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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