Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno, Kay Nottmeyer, Cleopatra Cabuz, Kazuyuki Minami, Takashi Kobayashi, Masayoshi Esashi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Monitoring motion parameters is increasingly important in automotive applications and robotics. A silicon micromachined structure 1 cm × 2 cm in size has been designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of (a) the displacement due to acceleration and (b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

Original languageEnglish
Pages (from-to)646-650
Number of pages5
JournalSensors and Actuators, A: Physical
Volume54
Issue number1-3
Publication statusPublished - 1996 Jun
Externally publishedYes

Fingerprint

Silicon
Fabrication
Torsional stress
fabrication
torsion
silicon
centrifugal force
robotics
Robotics
Monitoring
sensitivity

Keywords

  • Accelerometers
  • Angular rate sensors
  • Bulk micromachining
  • Silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate. / Mizuno, Jun; Nottmeyer, Kay; Cabuz, Cleopatra; Minami, Kazuyuki; Kobayashi, Takashi; Esashi, Masayoshi.

In: Sensors and Actuators, A: Physical, Vol. 54, No. 1-3, 06.1996, p. 646-650.

Research output: Contribution to journalArticle

Mizuno, Jun ; Nottmeyer, Kay ; Cabuz, Cleopatra ; Minami, Kazuyuki ; Kobayashi, Takashi ; Esashi, Masayoshi. / Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate. In: Sensors and Actuators, A: Physical. 1996 ; Vol. 54, No. 1-3. pp. 646-650.
@article{c026f11bbfab4db2b85029c743562d2b,
title = "Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate",
abstract = "Monitoring motion parameters is increasingly important in automotive applications and robotics. A silicon micromachined structure 1 cm × 2 cm in size has been designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of (a) the displacement due to acceleration and (b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.",
keywords = "Accelerometers, Angular rate sensors, Bulk micromachining, Silicon",
author = "Jun Mizuno and Kay Nottmeyer and Cleopatra Cabuz and Kazuyuki Minami and Takashi Kobayashi and Masayoshi Esashi",
year = "1996",
month = "6",
language = "English",
volume = "54",
pages = "646--650",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1-3",

}

TY - JOUR

T1 - Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

AU - Mizuno, Jun

AU - Nottmeyer, Kay

AU - Cabuz, Cleopatra

AU - Minami, Kazuyuki

AU - Kobayashi, Takashi

AU - Esashi, Masayoshi

PY - 1996/6

Y1 - 1996/6

N2 - Monitoring motion parameters is increasingly important in automotive applications and robotics. A silicon micromachined structure 1 cm × 2 cm in size has been designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of (a) the displacement due to acceleration and (b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

AB - Monitoring motion parameters is increasingly important in automotive applications and robotics. A silicon micromachined structure 1 cm × 2 cm in size has been designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of (a) the displacement due to acceleration and (b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

KW - Accelerometers

KW - Angular rate sensors

KW - Bulk micromachining

KW - Silicon

UR - http://www.scopus.com/inward/record.url?scp=24944461460&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=24944461460&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:24944461460

VL - 54

SP - 646

EP - 650

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 1-3

ER -