Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno, Kay Nottmeyer, Cleopatra Cabuz, Kazuyuki Minami, Takashi Kobayashi, Masayoshi Esashi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Monitoring motion parameters is increasingly important in automotive applications and robotics. A silicon micromachined structure 1 cm × 2 cm in size has been designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of (a) the displacement due to acceleration and (b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

Original languageEnglish
Pages (from-to)646-650
Number of pages5
JournalSensors and Actuators, A: Physical
Volume54
Issue number1-3
DOIs
Publication statusPublished - 1996 Jun
Externally publishedYes

Keywords

  • Accelerometers
  • Angular rate sensors
  • Bulk micromachining
  • Silicon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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