Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno*, Kay Nottmeyer, Cleopatra Cabuz, Takashi Kobayashi, Masayoshi Esashi

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate'. Together they form a unique fingerprint.

Engineering & Materials Science