Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application

Hayato Kumagai, Kazuaki Sawada, Kazuhiro Takahashi, Nobutaka Sato, Shinji Takeoka, Toshinori Fujie

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We developed a stretchable freestanding ultra-thin sheet composed by poly(styrene-butadiene-styrene) (SBS) and evaluated its optomechanical properties. The freestanding SBS sheet with a thickness of 675 nm was formed above a through hole of a PDMS sheet. Deflection of the freestanding sheet with a size of 10.4 mm × 10.4 mm was found to be 50 nm by optical surface profiler. In evaluation of the sheet stretch measured by reflection spectra of a thin-film interference peak, SBS nanosheet revealed about 38% of elastic strain. This result demonstrated that the SBS nanosheet is stretchable even though its thickness is one order magnitude of thinner than PDMS.

Original languageEnglish
Title of host publication2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
PublisherIEEE Computer Society
Volume2016-September
ISBN (Electronic)9781509010356
DOIs
Publication statusPublished - 2016 Sep 13
Event21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
Duration: 2016 Jul 312016 Aug 4

Other

Other21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
CountrySingapore
CitySingapore
Period16/7/3116/8/4

Fingerprint

MOEMS
Styrene
Nanosheets
Fabrication
Butadiene
Thin films
1,3-butadiene

Keywords

  • free-standing sheet
  • MEMS
  • SBS
  • stretchable

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Kumagai, H., Sawada, K., Takahashi, K., Sato, N., Takeoka, S., & Fujie, T. (2016). Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings (Vol. 2016-September). [7565890] IEEE Computer Society. https://doi.org/10.1109/OMN.2016.7565890

Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application. / Kumagai, Hayato; Sawada, Kazuaki; Takahashi, Kazuhiro; Sato, Nobutaka; Takeoka, Shinji; Fujie, Toshinori.

2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. Vol. 2016-September IEEE Computer Society, 2016. 7565890.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kumagai, H, Sawada, K, Takahashi, K, Sato, N, Takeoka, S & Fujie, T 2016, Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application. in 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. vol. 2016-September, 7565890, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, Singapore, 16/7/31. https://doi.org/10.1109/OMN.2016.7565890
Kumagai H, Sawada K, Takahashi K, Sato N, Takeoka S, Fujie T. Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application. In 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. Vol. 2016-September. IEEE Computer Society. 2016. 7565890 https://doi.org/10.1109/OMN.2016.7565890
Kumagai, Hayato ; Sawada, Kazuaki ; Takahashi, Kazuhiro ; Sato, Nobutaka ; Takeoka, Shinji ; Fujie, Toshinori. / Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application. 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. Vol. 2016-September IEEE Computer Society, 2016.
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