Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application

Hayato Kumagai; Kazuaki Sawada; Kazuhiro Takahashi; Nobutaka Sato; Shinji Takeoka; Toshinori Fujie

doi:10.1109/OMN.2016.7565890

Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application

Hayato Kumagai, Kazuaki Sawada, Kazuhiro Takahashi, Nobutaka Sato, Shinji Takeoka, Toshinori Fujie

Waseda Institute for Advanced Study

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We developed a stretchable freestanding ultra-thin sheet composed by poly(styrene-butadiene-styrene) (SBS) and evaluated its optomechanical properties. The freestanding SBS sheet with a thickness of 675 nm was formed above a through hole of a PDMS sheet. Deflection of the freestanding sheet with a size of 10.4 mm × 10.4 mm was found to be 50 nm by optical surface profiler. In evaluation of the sheet stretch measured by reflection spectra of a thin-film interference peak, SBS nanosheet revealed about 38% of elastic strain. This result demonstrated that the SBS nanosheet is stretchable even though its thickness is one order magnitude of thinner than PDMS.

Original language	English
Title of host publication	2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
Publisher	IEEE Computer Society
Volume	2016-September
ISBN (Electronic)	9781509010356
DOIs	https://doi.org/10.1109/OMN.2016.7565890
Publication status	Published - 2016 Sept 13
Event	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore Duration: 2016 Jul 31 → 2016 Aug 4

Other

Other	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
Country/Territory	Singapore
City	Singapore
Period	16/7/31 → 16/8/4

Keywords

free-standing sheet
MEMS
SBS
stretchable

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMN.2016.7565890

Cite this

Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application. / Kumagai, Hayato; Sawada, Kazuaki; Takahashi, Kazuhiro et al.

2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. Vol. 2016-September IEEE Computer Society, 2016. 7565890.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kumagai, H, Sawada, K, Takahashi, K, Sato, N, Takeoka, S & Fujie, T 2016, Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application. in 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. vol. 2016-September, 7565890, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, Singapore, 16/7/31. https://doi.org/10.1109/OMN.2016.7565890

@inproceedings{6df08134898b4a219f3034c347330c55,

title = "Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application",

abstract = "We developed a stretchable freestanding ultra-thin sheet composed by poly(styrene-butadiene-styrene) (SBS) and evaluated its optomechanical properties. The freestanding SBS sheet with a thickness of 675 nm was formed above a through hole of a PDMS sheet. Deflection of the freestanding sheet with a size of 10.4 mm × 10.4 mm was found to be 50 nm by optical surface profiler. In evaluation of the sheet stretch measured by reflection spectra of a thin-film interference peak, SBS nanosheet revealed about 38% of elastic strain. This result demonstrated that the SBS nanosheet is stretchable even though its thickness is one order magnitude of thinner than PDMS.",

keywords = "free-standing sheet, MEMS, SBS, stretchable",

author = "Hayato Kumagai and Kazuaki Sawada and Kazuhiro Takahashi and Nobutaka Sato and Shinji Takeoka and Toshinori Fujie",

year = "2016",

month = sep,

day = "13",

doi = "10.1109/OMN.2016.7565890",

language = "English",

volume = "2016-September",

booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",

publisher = "IEEE Computer Society",

address = "United States",

note = "21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",

}

TY - GEN

T1 - Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application

AU - Kumagai, Hayato

AU - Sawada, Kazuaki

AU - Takahashi, Kazuhiro

AU - Sato, Nobutaka

AU - Takeoka, Shinji

AU - Fujie, Toshinori

PY - 2016/9/13

Y1 - 2016/9/13

N2 - We developed a stretchable freestanding ultra-thin sheet composed by poly(styrene-butadiene-styrene) (SBS) and evaluated its optomechanical properties. The freestanding SBS sheet with a thickness of 675 nm was formed above a through hole of a PDMS sheet. Deflection of the freestanding sheet with a size of 10.4 mm × 10.4 mm was found to be 50 nm by optical surface profiler. In evaluation of the sheet stretch measured by reflection spectra of a thin-film interference peak, SBS nanosheet revealed about 38% of elastic strain. This result demonstrated that the SBS nanosheet is stretchable even though its thickness is one order magnitude of thinner than PDMS.

AB - We developed a stretchable freestanding ultra-thin sheet composed by poly(styrene-butadiene-styrene) (SBS) and evaluated its optomechanical properties. The freestanding SBS sheet with a thickness of 675 nm was formed above a through hole of a PDMS sheet. Deflection of the freestanding sheet with a size of 10.4 mm × 10.4 mm was found to be 50 nm by optical surface profiler. In evaluation of the sheet stretch measured by reflection spectra of a thin-film interference peak, SBS nanosheet revealed about 38% of elastic strain. This result demonstrated that the SBS nanosheet is stretchable even though its thickness is one order magnitude of thinner than PDMS.

KW - free-standing sheet

KW - MEMS

KW - SBS

KW - stretchable

UR - http://www.scopus.com/inward/record.url?scp=84990206636&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84990206636&partnerID=8YFLogxK

U2 - 10.1109/OMN.2016.7565890

DO - 10.1109/OMN.2016.7565890

M3 - Conference contribution

AN - SCOPUS:84990206636

VL - 2016-September

BT - 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings

PB - IEEE Computer Society

T2 - 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016

Y2 - 31 July 2016 through 4 August 2016

ER -

Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application

Abstract

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Keywords

ASJC Scopus subject areas

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