Fabrication and properties of microcapacitors with a one-nanometer-thick single Ti0.87O2 nanosheet

Daisuke Ogawa, Kosho Akatsuka, Tomoteru Fukumura, Minoru Osada, Takayoshi Sasaki, Tetsuya Hasegawa

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2 Citations (Scopus)

Abstract

The dielectric and insulating properties of a single Ti 0.87O2 nanosheet were investigated by fabricating an Au/single Ti0.87O2 nanosheet/Au planar microcapacitor structure. Capacitance and electric measurements of the nanosheet microcapacitor showed reproducibly good performance as a gate insulator: almost frequency-independent capacitance up to 1 MHz and extremely high electric field endurance of ≥ 20 MV cm-1.

Original languageEnglish
Pages (from-to)307-309
Number of pages3
JournalChemistry Letters
Volume43
Issue number3
DOIs
Publication statusPublished - 2014
Externally publishedYes

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ASJC Scopus subject areas

  • Chemistry(all)

Cite this

Ogawa, D., Akatsuka, K., Fukumura, T., Osada, M., Sasaki, T., & Hasegawa, T. (2014). Fabrication and properties of microcapacitors with a one-nanometer-thick single Ti0.87O2 nanosheet. Chemistry Letters, 43(3), 307-309. https://doi.org/10.1246/cl.130925