Fabrication of 3-D micromesh ni structures using electroplating

Hironobu Sato, Toshiharu Otsuka, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    This paper presents the fabrication method of 3-D Ni micromesh structures. Inverse-micromesh photoresist structures, fabricated by multiple inclined backside exposure, were used as molds for Ni electroplating. Ni micromeshes of about 3μm in diameter were realized by this method. This structure is useful for increasing the surface area of micro metal electrodes.

    Original languageEnglish
    Title of host publicationProceedings - Electrochemical Society
    EditorsJ.L. Davidson, P.J. Hesketh, D. Misra, S. Shoji
    Pages26-30
    Number of pages5
    Volume9
    Publication statusPublished - 2004
    EventMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI
    Duration: 2004 Oct 32004 Oct 8

    Other

    OtherMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium
    CityHonolulu, HI
    Period04/10/304/10/8

    Fingerprint

    Molds
    Electroplating
    Photoresists
    Fabrication
    Electrodes
    Metals

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Sato, H., Otsuka, T., & Shoji, S. (2004). Fabrication of 3-D micromesh ni structures using electroplating. In J. L. Davidson, P. J. Hesketh, D. Misra, & S. Shoji (Eds.), Proceedings - Electrochemical Society (Vol. 9, pp. 26-30)

    Fabrication of 3-D micromesh ni structures using electroplating. / Sato, Hironobu; Otsuka, Toshiharu; Shoji, Shuichi.

    Proceedings - Electrochemical Society. ed. / J.L. Davidson; P.J. Hesketh; D. Misra; S. Shoji. Vol. 9 2004. p. 26-30.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Sato, H, Otsuka, T & Shoji, S 2004, Fabrication of 3-D micromesh ni structures using electroplating. in JL Davidson, PJ Hesketh, D Misra & S Shoji (eds), Proceedings - Electrochemical Society. vol. 9, pp. 26-30, Microfabricated Systems and MEMS VII - Proceedings of the International Symposium, Honolulu, HI, 04/10/3.
    Sato H, Otsuka T, Shoji S. Fabrication of 3-D micromesh ni structures using electroplating. In Davidson JL, Hesketh PJ, Misra D, Shoji S, editors, Proceedings - Electrochemical Society. Vol. 9. 2004. p. 26-30
    Sato, Hironobu ; Otsuka, Toshiharu ; Shoji, Shuichi. / Fabrication of 3-D micromesh ni structures using electroplating. Proceedings - Electrochemical Society. editor / J.L. Davidson ; P.J. Hesketh ; D. Misra ; S. Shoji. Vol. 9 2004. pp. 26-30
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