Fabrication of 3D a-Si/SiO2 photonic crystals on 2D sub-micron-patterned InP substrates

Tetsuro Segawa*, Katsuyuki Utaka, Mitsuru Naganuma, Hisashi Sato, Shojiro Kawakami, Masayuki Izutsu, Masashi Nakao

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

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Engineering & Materials Science

Chemical Compounds