Fabrication of AFM probe with CuO nanowire formed by stress-induced method

Atsushi Hosoi, Hisataka Koto, Yang Ju

    Research output: Contribution to journalArticle

    Abstract

    A novel method has been proposed to fabricate an atomic force microscope (AFM) probe using CuO nanowire and a stress-induced method that can form the nanowire easily. By heating a commercial AFM probe with a film coating of Ta and Cu, a Cu hillock with CuO nanowires on its surface could be formed at the end of the probe. The thickness of the coating films, the heating temperature, and the heating time were investigated to obtain CuO nanowires with a high aspect ratio for use as an AFM probe tip. It was found that a suitable probe tip can be fabricated using the a Cu film thickness of 700 nm, a heating temperature of 380 °C and a heating time of 6 h. Probe tips (~5 μm high) and nanowires of ~25 nm diameter were obtained successfully. In the range evaluated, the measurement resolution of the CuO nanowire probe was slightly worse than that of a commercial AFM probe. However, both probes had almost the same dimensional measurement precision.

    Original languageEnglish
    Pages (from-to)2221-2229
    Number of pages9
    JournalMicrosystem Technologies
    Volume20
    Issue number12
    DOIs
    Publication statusPublished - 2014 Sep 11

      Fingerprint

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Hardware and Architecture
    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics

    Cite this