Fabrication of BaTiO3-PTFE composite film for embedded capacitor employing aerosol deposition

Yoon Hyun Kim, Hyung Jun Kim, Jung Hyuk Koh, Jae Geun Ha, Young Hoon Yun, Song Min Nam

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Abstract

The potential for using aerosol deposition (AD) as an alternative fabrication method to the conventional polymer composite process for embedded capacitors was examined. In order to achieve a high relative dielectric permittivity, BaTiO3-polytetrafluoroethylene (PTFE) composite thick films were attempted by AD at room temperature. For the high dielectric constant, the BaTiO3-PTFE composite films grown by AD should satisfied the following two critical conditions: a reduced decrement in ceramic particle size and a relieved distortion of the crystal structure. However, the relative permitivity of the composite films was too low compared with that of the BaTiO3 films grown by AD. By predicting the dielectric constant in several composite models using the Hashin-Shtrikman bounds theory and 3-dimenstional (3-D) electrostatic simulation, we confirmed that the connectivity between ceramic particles is a highly critical factor for achieving a high dielectric constant in composite films.

Original languageEnglish
Pages (from-to)1859-1864
Number of pages6
JournalCeramics International
Volume37
Issue number6
DOIs
Publication statusPublished - 2011 Aug
Externally publishedYes

Keywords

  • Aerosol deposition (AD)
  • B. Composite
  • C. Dielectric properties
  • D. BaTiO and titanates

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry

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