Fabrication of [CoB/Pd]n multilayered perpendicular magnetic recording media using DC magnetron sputtering with N2

Toru Asahi, M. Tanaka, J. Sayama, J. Kawaji, Tetsuya Osaka, S. Matsunuma

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

[CoB/Pd]n films were prepared with dc magnetron sputtering and the effect of preparation conditions, the addition of N2 to Ar gas and heating of substrates during the deposition, on its microstructure and magnetic properties were examined.

Original languageEnglish
Title of host publicationJoint NAPMRC 2003 - Digest of Technical Papers [Perpendicular Magnetic Recording Conference]
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages28
Number of pages1
ISBN (Print)078037746X, 9780780377462
DOIs
Publication statusPublished - 2003
EventJoint 2nd North American Perpendicular Magnetic Recording Conference, NAPMRC 2003 and 6th Perpendicular Magnetic Recording Conference - Monterey, United States
Duration: 2003 Jan 62003 Jan 8

Other

OtherJoint 2nd North American Perpendicular Magnetic Recording Conference, NAPMRC 2003 and 6th Perpendicular Magnetic Recording Conference
CountryUnited States
CityMonterey
Period03/1/603/1/8

Keywords

  • Artificial intelligence
  • Fabrication
  • Magnetic anisotropy
  • Magnetic films
  • Magnetic multilayers
  • Magnetic properties
  • Perpendicular magnetic anisotropy
  • Perpendicular magnetic recording
  • Sputtering
  • Substrates

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Asahi, T., Tanaka, M., Sayama, J., Kawaji, J., Osaka, T., & Matsunuma, S. (2003). Fabrication of [CoB/Pd]n multilayered perpendicular magnetic recording media using DC magnetron sputtering with N2 In Joint NAPMRC 2003 - Digest of Technical Papers [Perpendicular Magnetic Recording Conference] (pp. 28). [1177032] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NAPMRC.2003.1177032