Fabrication of diamond films under high density helium plasma formed by electron cyclotron resonance

Motokazu Yuasa, Hiroshi Kawarada, Jin Wei, Jing Sheng Ma, Jun ichi Suzuki, Sigenobu Okada, Akio Hiraki

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds