Fabrication of fine plastic microchannel by using hot embossing

M. Ishizuka, Jun Mizuno, T. Harada, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

Original languageEnglish
Title of host publicationProceedings - Electrochemical Society
EditorsJ.L. Davidson, P.J. Hesketh, D. Misra, S. Shoji
Pages303-307
Number of pages5
Volume9
Publication statusPublished - 2004
EventMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI
Duration: 2004 Oct 32004 Oct 8

Other

OtherMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium
CityHonolulu, HI
Period04/10/304/10/8

Fingerprint

Microchannels
Plastics
Fabrication
Reactive ion etching
Molds
Silicon
Substrates
Temperature

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ishizuka, M., Mizuno, J., Harada, T., & Shoji, S. (2004). Fabrication of fine plastic microchannel by using hot embossing. In J. L. Davidson, P. J. Hesketh, D. Misra, & S. Shoji (Eds.), Proceedings - Electrochemical Society (Vol. 9, pp. 303-307)

Fabrication of fine plastic microchannel by using hot embossing. / Ishizuka, M.; Mizuno, Jun; Harada, T.; Shoji, Shuichi.

Proceedings - Electrochemical Society. ed. / J.L. Davidson; P.J. Hesketh; D. Misra; S. Shoji. Vol. 9 2004. p. 303-307.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ishizuka, M, Mizuno, J, Harada, T & Shoji, S 2004, Fabrication of fine plastic microchannel by using hot embossing. in JL Davidson, PJ Hesketh, D Misra & S Shoji (eds), Proceedings - Electrochemical Society. vol. 9, pp. 303-307, Microfabricated Systems and MEMS VII - Proceedings of the International Symposium, Honolulu, HI, 04/10/3.
Ishizuka M, Mizuno J, Harada T, Shoji S. Fabrication of fine plastic microchannel by using hot embossing. In Davidson JL, Hesketh PJ, Misra D, Shoji S, editors, Proceedings - Electrochemical Society. Vol. 9. 2004. p. 303-307
Ishizuka, M. ; Mizuno, Jun ; Harada, T. ; Shoji, Shuichi. / Fabrication of fine plastic microchannel by using hot embossing. Proceedings - Electrochemical Society. editor / J.L. Davidson ; P.J. Hesketh ; D. Misra ; S. Shoji. Vol. 9 2004. pp. 303-307
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