Fabrication of fine plastic microchannel by using hot embossing

M. Ishizuka, J. Mizuno, T. Harada, S. Shoji

Research output: Contribution to conferencePaper

Abstract

Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

Original languageEnglish
Pages303-307
Number of pages5
Publication statusPublished - 2004 Dec 1
EventMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States
Duration: 2004 Oct 32004 Oct 8

Conference

ConferenceMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium
CountryUnited States
CityHonolulu, HI
Period04/10/304/10/8

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ishizuka, M., Mizuno, J., Harada, T., & Shoji, S. (2004). Fabrication of fine plastic microchannel by using hot embossing. 303-307. Paper presented at Microfabricated Systems and MEMS VII - Proceedings of the International Symposium, Honolulu, HI, United States.