Fabrication of heteroepitaxial diamond thin films on Ir(001)/MgO(001) substrates using antenna-edge-type microwave plasma-assisted chemical vapor deposition

Toyokatsu Fujisaki, Minoru Tachiki, Norikazu Taniyama, Minoru Kudo, Hiroshi Kawarada

    Research output: Contribution to journalArticle

    9 Citations (Scopus)

    Abstract

    Diamond heteroepitaxial thin films were successfully synthesized on high-quality Ir(001)/MgO(001) substrates. In bias-enhanced nucleation, antenna-edge-type microwave plasma-assisted chemical vapor deposition (MPCVD) was used. Subsequently, the <001> selective and smoothing growth processes were conducted by conventional MPCVD. Reconstructed (2×1) structure patterns have been observed by reflection high-energy electron diffraction (RHEED), which indicated that the surface of the diamond film is very smooth. The mean roughness is less than 2 nm in a 10-μm2 area, as revealed by atomic force microscopy observations.

    Original languageEnglish
    Pages (from-to)478-481
    Number of pages4
    JournalDiamond and Related Materials
    Volume11
    Issue number3-6
    DOIs
    Publication statusPublished - 2002 Mar

    Fingerprint

    Diamond films
    Chemical vapor deposition
    antennas
    diamonds
    Microwaves
    vapor deposition
    Antennas
    Plasmas
    microwaves
    Fabrication
    Thin films
    fabrication
    Diamond
    Reflection high energy electron diffraction
    Substrates
    thin films
    diamond films
    smoothing
    high energy electrons
    Atomic force microscopy

    Keywords

    • Chemical vapor deposition
    • Diamond
    • Heteroepitaxy
    • Iridium

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Materials Chemistry
    • Surfaces, Coatings and Films
    • Surfaces and Interfaces

    Cite this

    Fabrication of heteroepitaxial diamond thin films on Ir(001)/MgO(001) substrates using antenna-edge-type microwave plasma-assisted chemical vapor deposition. / Fujisaki, Toyokatsu; Tachiki, Minoru; Taniyama, Norikazu; Kudo, Minoru; Kawarada, Hiroshi.

    In: Diamond and Related Materials, Vol. 11, No. 3-6, 03.2002, p. 478-481.

    Research output: Contribution to journalArticle

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    AU - Kudo, Minoru

    AU - Kawarada, Hiroshi

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