Fabrication of heterostructure p-β-Fe0.95Mn0.05Si2/n-Si diodes by Fe+ and Mn+ co-implantation in Si(100) substrates

H. Katsumata*, Y. Makita, T. Takada, H. Tanoue, Naoto Kobayashi, M. Hasegawa, H. Kakemoto, T. Tsukamoto, S. Uekusa

*Corresponding author for this work

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