Fabrication of high kt2and k' 352Sc0.4A10.6N thin films by RF magnetron sputtering

Yuki Shimizu, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Scandium aluminum nitride (ScAlN) films are commercially used for RF filter application owing to their large thickness extensional mode electromechanical coupling coefficient k-{ mathrm{t}}{} {2}. In addition, c-axis tilted ScAlN films are good candidates for biosensors and gyro-sensors because of their high quasi thickness shear mode k-{35 {2}} { prime}. In this study, we fabricated c-axis oriented (0001) Sco.4Alo.6N thin film and c-axis 34° tilted Sco.4Alo.6N thin film by RF magnetron sputtering. k-{ mathrm{t}}{} {2} of the c-axis oriented (0001) Sco.4Alo.6N film was evaluated to be 21.4% by CL method and approximately 28% by other four kinds of k-{ mathrm{t}}{} {2} estimation methods. k-{35 {2}} { prime} of the c-axis tilted Sc0.4Al0.6N film was evaluated to be at least 22.9%. These high k-{ mathrm{t}}{} {2} and k-{35 {2}} { prime} of the Sco.4Alo.6N thin films can be attributed to the high crystalline orientation and the suppression of abnormally oriented grains (AOGs) at high Sc concentration.

Original languageEnglish
Title of host publicationIUS 2022 - IEEE International Ultrasonics Symposium
PublisherIEEE Computer Society
ISBN (Electronic)9781665466578
DOIs
Publication statusPublished - 2022
Event2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy
Duration: 2022 Oct 102022 Oct 13

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2022-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2022 IEEE International Ultrasonics Symposium, IUS 2022
Country/TerritoryItaly
CityVenice
Period22/10/1022/10/13

Keywords

  • electromechanical coupling coefficient
  • HBAR
  • piezoelectric film
  • scandium aluminum nitride

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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