Fabrication of highly dimension controlled PMMA microchip by hot embossing and low temperature direct bonding

Hidetoshi Shinohara, Jun Mizuno, Fumihiko Kitagawa, Koji Otsuka, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, a PMMA (poly-methyl methacrylate) microchip, which has shallow dams of about 5 μm gaps, was fabricated and evaluated. Accurate dimension control of the micro-channels was realized by not only optimizing hot embossing conditions but also employing low temperature plasma activated bonding.

Original languageEnglish
Title of host publicationMicro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherJapan Academic Association Inc
Pages158-160
Number of pages3
Publication statusPublished - 2006
Event10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006 - Tokyo
Duration: 2006 Nov 52006 Nov 9

Other

Other10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006
CityTokyo
Period06/11/506/11/9

Fingerprint

Polymethyl Methacrylate
Polymethyl methacrylates
Dams
Plasmas
Fabrication
Temperature

Keywords

  • Hot embossing
  • Polymer microchip
  • Surface activation bonding

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Bioengineering

Cite this

Shinohara, H., Mizuno, J., Kitagawa, F., Otsuka, K., & Shoji, S. (2006). Fabrication of highly dimension controlled PMMA microchip by hot embossing and low temperature direct bonding. In Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 158-160). Japan Academic Association Inc.

Fabrication of highly dimension controlled PMMA microchip by hot embossing and low temperature direct bonding. / Shinohara, Hidetoshi; Mizuno, Jun; Kitagawa, Fumihiko; Otsuka, Koji; Shoji, Shuichi.

Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Japan Academic Association Inc, 2006. p. 158-160.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shinohara, H, Mizuno, J, Kitagawa, F, Otsuka, K & Shoji, S 2006, Fabrication of highly dimension controlled PMMA microchip by hot embossing and low temperature direct bonding. in Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Japan Academic Association Inc, pp. 158-160, 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006, Tokyo, 06/11/5.
Shinohara H, Mizuno J, Kitagawa F, Otsuka K, Shoji S. Fabrication of highly dimension controlled PMMA microchip by hot embossing and low temperature direct bonding. In Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Japan Academic Association Inc. 2006. p. 158-160
Shinohara, Hidetoshi ; Mizuno, Jun ; Kitagawa, Fumihiko ; Otsuka, Koji ; Shoji, Shuichi. / Fabrication of highly dimension controlled PMMA microchip by hot embossing and low temperature direct bonding. Micro Total Analysis Systems - Proceedings of MicroTAS 2006 Conference: 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences. Japan Academic Association Inc, 2006. pp. 158-160
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abstract = "In this paper, a PMMA (poly-methyl methacrylate) microchip, which has shallow dams of about 5 μm gaps, was fabricated and evaluated. Accurate dimension control of the micro-channels was realized by not only optimizing hot embossing conditions but also employing low temperature plasma activated bonding.",
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AU - Shoji, Shuichi

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