Fabrication of large-area and very uniform two-dimensional sub-micron periodic patterns on 1500nm range multi-quantum well structures using two-time laser holography

H. Nakaoka, S. Murakami, T. Nakano, K. Honma, K. Utaka, M. Nakao

Research output: Contribution to journalConference article

Abstract

We have fabricated two- and three-dimensional (2D/3D) sub-micron periodic patterns with periods of 500nm and 250nm on 1500nm-wavelength-range multi-quantum well structures by using two-time laser holography, and successfully observed vertical emission enhancement and also distributed feedback resonance by optical excitations.

Original languageEnglish
Pages (from-to)167-170
Number of pages4
JournalConference Proceedings - International Conference on Indium Phosphide and Related Materials
Publication statusPublished - 2004 Dec 1
Event2004 International Conference on Indium Phosphide and Related Materials, 16th IPRM - Kagoshima, Japan
Duration: 2004 May 312004 Jun 4

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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