Fabrication of low dislocation density GaN template by nano-channel FIELO communication using nanoimprint lithography

Akiko Okada, Shuichi Shoji, Hidetoshi Shinohara, Hiromi Nishihara, Hiroshi Goto, Haruo Sunakawa, Toshiharu Matsueda, Akira Usui, Atsushi A. Yamaguchi, Jun Mizuno

Research output: Contribution to journalArticle

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)69-72
Number of pages4
JournalJournal of Photopolymer Science and Technology
Volume26
Issue number1
DOIs
Publication statusPublished - 2013 Aug 2

Keywords

  • Dry etching
  • Hydride vapor phase epitaxy
  • Light-emitting diode
  • Nanoimprint lithography

ASJC Scopus subject areas

  • Polymers and Plastics
  • Organic Chemistry
  • Materials Chemistry

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