Fabrication of metallic nanopatterns using the vacuum type UV-NIL equipment

Research output: Contribution to journalArticle

Original languageEnglish
JournalIEEJ Transactions on Electrical and Electronic Engineering
Volume2
Issue number3
DOIs
Publication statusPublished - 2007 May
Externally publishedYes

Fingerprint

Electrodeposition
Vacuum
Fabrication

Keywords

  • Electrodeposition
  • Metallic nanopatterns
  • Nanoimprint
  • Photocurable resin
  • Vacuum type

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

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title = "Fabrication of metallic nanopatterns using the vacuum type UV-NIL equipment",
keywords = "Electrodeposition, Metallic nanopatterns, Nanoimprint, Photocurable resin, Vacuum type",
author = "Makoto Fukuhara and Jun Mizuno and Mikiko Saito and Takayuki Homma and Shuichi Shoji",
year = "2007",
month = "5",
doi = "10.1002/tee.20179",
language = "English",
volume = "2",
journal = "IEEJ Transactions on Electrical and Electronic Engineering",
issn = "1931-4973",
publisher = "John Wiley and Sons Inc.",
number = "3",

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AU - Mizuno, Jun

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AU - Shoji, Shuichi

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KW - Nanoimprint

KW - Photocurable resin

KW - Vacuum type

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