Fabrication of metallic nanopatterns using the vacuum type UV-NIL equipment

Research output: Contribution to journalArticle

Original languageEnglish
JournalIEEJ Transactions on Electrical and Electronic Engineering
Volume2
Issue number3
DOIs
Publication statusPublished - 2007 May
Externally publishedYes

Keywords

  • Electrodeposition
  • Metallic nanopatterns
  • Nanoimprint
  • Photocurable resin
  • Vacuum type

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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