Abstract
An ODS-SAM was successfully formed onto an ITO surface by CVD. The originally hydrophilic surface became highly hydrophobic with maximum water-contact angle reaching about 120°C. The final contact angles of the ODS-SAMs depended significantly on CVD temperature and treatment time. The surface hydrophobicity of ODS-SAM samples deposited at 100 and 150°C was superior to that of a sample treated at 50°C. It was determined that the CVD temperature of 150°C is optimum for ODS-SAM preparation.
Original language | English |
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Pages (from-to) | 1152-1156 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 21 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2003 Jul |
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Surfaces and Interfaces
- Physics and Astronomy (miscellaneous)