Fabrication of microstructured copper on an indium-tin-oxide surface using a micropatterned self-assembled monolayer as a template

Shuuichi Asakura; Mitsuhito Hirota; Akio Fuwa

doi:10.1116/1.1584037

Fabrication of microstructured copper on an indium-tin-oxide surface using a micropatterned self-assembled monolayer as a template

Shuuichi Asakura^*, Mitsuhito Hirota, Akio Fuwa

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

An ODS-SAM was successfully formed onto an ITO surface by CVD. The originally hydrophilic surface became highly hydrophobic with maximum water-contact angle reaching about 120°C. The final contact angles of the ODS-SAMs depended significantly on CVD temperature and treatment time. The surface hydrophobicity of ODS-SAM samples deposited at 100 and 150°C was superior to that of a sample treated at 50°C. It was determined that the CVD temperature of 150°C is optimum for ODS-SAM preparation.

Original language	English
Pages (from-to)	1152-1156
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	21
Issue number	4
DOIs	https://doi.org/10.1116/1.1584037
Publication status	Published - 2003 Jul

ASJC Scopus subject areas

Surfaces, Coatings and Films
Surfaces and Interfaces
Physics and Astronomy (miscellaneous)

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abstract = "An ODS-SAM was successfully formed onto an ITO surface by CVD. The originally hydrophilic surface became highly hydrophobic with maximum water-contact angle reaching about 120°C. The final contact angles of the ODS-SAMs depended significantly on CVD temperature and treatment time. The surface hydrophobicity of ODS-SAM samples deposited at 100 and 150°C was superior to that of a sample treated at 50°C. It was determined that the CVD temperature of 150°C is optimum for ODS-SAM preparation.",

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AU - Hirota, Mitsuhito

AU - Fuwa, Akio

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AB - An ODS-SAM was successfully formed onto an ITO surface by CVD. The originally hydrophilic surface became highly hydrophobic with maximum water-contact angle reaching about 120°C. The final contact angles of the ODS-SAMs depended significantly on CVD temperature and treatment time. The surface hydrophobicity of ODS-SAM samples deposited at 100 and 150°C was superior to that of a sample treated at 50°C. It was determined that the CVD temperature of 150°C is optimum for ODS-SAM preparation.

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Fabrication of microstructured copper on an indium-tin-oxide surface using a micropatterned self-assembled monolayer as a template

Abstract

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