Fabrication of microstructured copper on an indium-tin-oxide surface using a micropatterned self-assembled monolayer as a template

Shuuichi Asakura, Mitsuhito Hirota, Akio Fuwa

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    9 Citations (Scopus)


    An ODS-SAM was successfully formed onto an ITO surface by CVD. The originally hydrophilic surface became highly hydrophobic with maximum water-contact angle reaching about 120°C. The final contact angles of the ODS-SAMs depended significantly on CVD temperature and treatment time. The surface hydrophobicity of ODS-SAM samples deposited at 100 and 150°C was superior to that of a sample treated at 50°C. It was determined that the CVD temperature of 150°C is optimum for ODS-SAM preparation.

    Original languageEnglish
    Pages (from-to)1152-1156
    Number of pages5
    JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
    Issue number4
    Publication statusPublished - 2003 Jul


    ASJC Scopus subject areas

    • Surfaces, Coatings and Films
    • Surfaces and Interfaces
    • Physics and Astronomy (miscellaneous)

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