Fabrication of multilayer interconnection using ultraviolet nanoimprint lithography

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Advanced large scale integrated circuits (LSI) and smart sensor systems require nanoscale interconnection to transmit signals. In this work, an approach to realize multilayer interconnection based on ultraviolet nanoimprint lithography (UV-NIL) technology and copper electroplating is discussed. UV-NIL is a low-cost, mass-production technology. Nanoscale dot array patterns and line array patterns of nickel and copper were formed on a silicon substrate using UV-NIL in combination with electroplating. Imprinted 220 nm hole patterns and 150 nm line patterns were formed on photocurable resin with high dimensional accuracy. Using these resin patterns as a mask layer, 245 nm metal dot and 195 nm metal line array patterns were successfully fabricated by electroplating.

Original languageEnglish
Title of host publication4th International Conference on Networked Sensing Systems, INSS
Pages130-133
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event4th International Conference on Networked Sensing Systems, INSS - Braunschweig, Germany
Duration: 2007 Jun 62007 Jun 8

Publication series

Name4th International Conference on Networked Sensing Systems, INSS

Conference

Conference4th International Conference on Networked Sensing Systems, INSS
CountryGermany
CityBraunschweig
Period07/6/607/6/8

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Keywords

  • Copper electroplating
  • Multilayer interconnection
  • Nanodot
  • Nanoline
  • Ultraviolet nanoimprint lithography (UV-NIL)

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Control and Systems Engineering

Cite this

Ono, H., Shoji, S., Mizuno, J., & Saito, M. (2007). Fabrication of multilayer interconnection using ultraviolet nanoimprint lithography. In 4th International Conference on Networked Sensing Systems, INSS (pp. 130-133). [4297406] (4th International Conference on Networked Sensing Systems, INSS). https://doi.org/10.1109/INSS.2007.4297406