Fabrication of nano-sized single-walled carbon nanotube vias for electronic device applications

T. Iwasaki, R. Morikane, G. Zhong, T. Edura, K. Tsutsui, Y. Wada, Hiroshi Kawarada

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    Vertically aligned single-walled carbon nanotubes (SWNTs) were synthesized at a low temperature of 600°C by radical chemical vapor deposition (CVD). For applying this technique to electronic devices, we synthesized SWNTs in nano-sized SiO2 holes to fabricate SWNT-vias, which is expected to be used for multi-layer interconnects and vertically aligned field effect transistors (FET). SWNTs were grown in holes with various sizes and shapes patterned by electron beam lithography. We also show the concept of large area deposition of vertically aligned SWNTs by improved radical CVD system.

    Original languageEnglish
    Title of host publication2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
    Pages94-97
    Number of pages4
    Volume1
    Publication statusPublished - 2006
    Event2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings - Boston, MA
    Duration: 2006 May 72006 May 11

    Other

    Other2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
    CityBoston, MA
    Period06/5/706/5/11

    Fingerprint

    Single-walled carbon nanotubes (SWCN)
    Fabrication
    Chemical vapor deposition
    Electron beam lithography
    Field effect transistors
    Temperature

    Keywords

    • Nano-sized via
    • Radical chemical vapor deposition
    • Single-walled carbon nanotubes
    • Vertically aligned

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Iwasaki, T., Morikane, R., Zhong, G., Edura, T., Tsutsui, K., Wada, Y., & Kawarada, H. (2006). Fabrication of nano-sized single-walled carbon nanotube vias for electronic device applications. In 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings (Vol. 1, pp. 94-97)

    Fabrication of nano-sized single-walled carbon nanotube vias for electronic device applications. / Iwasaki, T.; Morikane, R.; Zhong, G.; Edura, T.; Tsutsui, K.; Wada, Y.; Kawarada, Hiroshi.

    2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. Vol. 1 2006. p. 94-97.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Iwasaki, T, Morikane, R, Zhong, G, Edura, T, Tsutsui, K, Wada, Y & Kawarada, H 2006, Fabrication of nano-sized single-walled carbon nanotube vias for electronic device applications. in 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. vol. 1, pp. 94-97, 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings, Boston, MA, 06/5/7.
    Iwasaki T, Morikane R, Zhong G, Edura T, Tsutsui K, Wada Y et al. Fabrication of nano-sized single-walled carbon nanotube vias for electronic device applications. In 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. Vol. 1. 2006. p. 94-97
    Iwasaki, T. ; Morikane, R. ; Zhong, G. ; Edura, T. ; Tsutsui, K. ; Wada, Y. ; Kawarada, Hiroshi. / Fabrication of nano-sized single-walled carbon nanotube vias for electronic device applications. 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. Vol. 1 2006. pp. 94-97
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