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Fabrication of Passive Thin Film Capacitor by Using Semiconductor Technology
Ichiro Koiwa, Kinya Ashikaga, Makoto Terui, Yasushi Shiraishi, Noritaka Anzai, Takashi Ohsumi, Tetsuya Osaka, Tomoya Kumagai, Yoshimi Sato, Akira Hashimoto
Research output: Contribution to journal › Article › peer-review
3
Citations
(Scopus)