Fabrication of Passive Thin Film Capacitor by Using Semiconductor Technology

Ichiro Koiwa, Kinya Ashikaga, Makoto Terui, Yasushi Shiraishi, Noritaka Anzai, Takashi Ohsumi, Tetsuya Osaka, Tomoya Kumagai, Yoshimi Sato, Akira Hashimoto

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Engineering & Materials Science