Fabrication of patterned nanostructures with various metal species on Si wafer surfaces by maskless and electroless process

Nobuhiro Kubo, Takayuki Homma, Yosuke Hondo, Tetsuya Osaka

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

Maskless and electroless fabrication was demonstrated to form patterned nanostructures of various metal species, based upon the process previously developed by the authors. In this process, the metallic nanostructures were formed on the surface of clean, hydrogen terminated p-(1 0 0) Si wafer with pre-patterned nanoscopic defects, which were confirmed to possess higher activity for the reductive deposition reaction of the metal ion species. The deposition was achieved spontaneously and selectively at the defect sites on the wafer surface by immersing into dilute aqueous fluoride solution containing trace amount of metal ion species. By optimizing the formation condition of the patterned defects and composition of the solution, fabrication of patterned nanostructures of various metallic species such as Au, Ag, and Co, was achieved. Formation of the patterned nanostructures to 10 μm2 in extent, as well as control of the feature size of the deposits by adjusting the formation condition of the patterned defects were also attempted.

Original languageEnglish
Pages (from-to)834-837
Number of pages4
JournalElectrochimica Acta
Volume51
Issue number5
DOIs
Publication statusPublished - 2005 Nov 10

Fingerprint

Nanostructures
Metals
Fabrication
Defects
Metal ions
Fluorides
Hydrogen
Deposits
Chemical analysis

Keywords

  • Electroless deposition process
  • Maskless nanofabrication
  • Metal nanostructures
  • Nanodots
  • Si surface

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Analytical Chemistry
  • Electrochemistry

Cite this

Fabrication of patterned nanostructures with various metal species on Si wafer surfaces by maskless and electroless process. / Kubo, Nobuhiro; Homma, Takayuki; Hondo, Yosuke; Osaka, Tetsuya.

In: Electrochimica Acta, Vol. 51, No. 5, 10.11.2005, p. 834-837.

Research output: Contribution to journalArticle

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