Fabrication of plate-laminated waveguide for 350GHz band by silicon process

Jiro Hirokawa, Satoshi Suetsugu, Yusuke Minamikata, Tadao Nagatsuma, Hiroyuki Seto, Yoshiyuki Inoue, Mikiko Saito

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the fabrication of plate-laminated waveguides and cavities for 350GHz band by silicon process where the tolerance is less than several μm. We measure the transmission loss of the waveguide and the Q factors of the cavities, and then estimate the equivalent conductivity. We will also fabricate the plate-laminated waveguide slot array antennas (Y.Miura, J.Hirokawa et al., IEEE Trans. Antennas Propagat., 59, 2011, pp.2844-2851) and show the measured results in the conference.

Original languageEnglish
Title of host publication2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9789090086286
DOIs
Publication statusPublished - 2015 Oct 21
Event1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015 - Gran Canaria, Spain
Duration: 2015 May 162015 May 24

Other

Other1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
CountrySpain
CityGran Canaria
Period15/5/1615/5/24

Fingerprint

tolerance
Waveguides
Fabrication
Silicon
Antenna arrays
Antennas

ASJC Scopus subject areas

  • Communication
  • Computer Networks and Communications

Cite this

Hirokawa, J., Suetsugu, S., Minamikata, Y., Nagatsuma, T., Seto, H., Inoue, Y., & Saito, M. (2015). Fabrication of plate-laminated waveguide for 350GHz band by silicon process. In 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015 [7302839] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/URSI-AT-RASC.2015.7302839

Fabrication of plate-laminated waveguide for 350GHz band by silicon process. / Hirokawa, Jiro; Suetsugu, Satoshi; Minamikata, Yusuke; Nagatsuma, Tadao; Seto, Hiroyuki; Inoue, Yoshiyuki; Saito, Mikiko.

2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 7302839.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hirokawa, J, Suetsugu, S, Minamikata, Y, Nagatsuma, T, Seto, H, Inoue, Y & Saito, M 2015, Fabrication of plate-laminated waveguide for 350GHz band by silicon process. in 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015., 7302839, Institute of Electrical and Electronics Engineers Inc., 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015, Gran Canaria, Spain, 15/5/16. https://doi.org/10.1109/URSI-AT-RASC.2015.7302839
Hirokawa J, Suetsugu S, Minamikata Y, Nagatsuma T, Seto H, Inoue Y et al. Fabrication of plate-laminated waveguide for 350GHz band by silicon process. In 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015. Institute of Electrical and Electronics Engineers Inc. 2015. 7302839 https://doi.org/10.1109/URSI-AT-RASC.2015.7302839
Hirokawa, Jiro ; Suetsugu, Satoshi ; Minamikata, Yusuke ; Nagatsuma, Tadao ; Seto, Hiroyuki ; Inoue, Yoshiyuki ; Saito, Mikiko. / Fabrication of plate-laminated waveguide for 350GHz band by silicon process. 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015. Institute of Electrical and Electronics Engineers Inc., 2015.
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