Fabrication of plate-laminated waveguide for 350GHz band by silicon process

Jiro Hirokawa, Satoshi Suetsugu, Yusuke Minamikata, Tadao Nagatsuma, Hiroyuki Seto, Yoshiyuki Inoue, Mikiko Saito

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the fabrication of plate-laminated waveguides and cavities for 350GHz band by silicon process where the tolerance is less than several μm. We measure the transmission loss of the waveguide and the Q factors of the cavities, and then estimate the equivalent conductivity. We will also fabricate the plate-laminated waveguide slot array antennas (Y.Miura, J.Hirokawa et al., IEEE Trans. Antennas Propagat., 59, 2011, pp.2844-2851) and show the measured results in the conference.

Original languageEnglish
Title of host publication2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9789090086286
DOIs
Publication statusPublished - 2015 Oct 21
Event1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015 - Gran Canaria, Spain
Duration: 2015 May 162015 May 24

Publication series

Name2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015

Other

Other1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
CountrySpain
CityGran Canaria
Period15/5/1615/5/24

ASJC Scopus subject areas

  • Communication
  • Computer Networks and Communications

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    Hirokawa, J., Suetsugu, S., Minamikata, Y., Nagatsuma, T., Seto, H., Inoue, Y., & Saito, M. (2015). Fabrication of plate-laminated waveguide for 350GHz band by silicon process. In 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015 [7302839] (2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/URSI-AT-RASC.2015.7302839