Fabrication of plate-laminated waveguide for 350GHz band by silicon process

Jiro Hirokawa; Satoshi Suetsugu; Yusuke Minamikata; Tadao Nagatsuma; Hiroyuki Seto; Yoshiyuki Inoue; Mikiko Saito

doi:10.1109/URSI-AT-RASC.2015.7302839

Fabrication of plate-laminated waveguide for 350GHz band by silicon process

Jiro Hirokawa, Satoshi Suetsugu, Yusuke Minamikata, Tadao Nagatsuma, Hiroyuki Seto, Yoshiyuki Inoue, Mikiko Saito

Research Organization for Nano & Life Innovation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents the fabrication of plate-laminated waveguides and cavities for 350GHz band by silicon process where the tolerance is less than several μm. We measure the transmission loss of the waveguide and the Q factors of the cavities, and then estimate the equivalent conductivity. We will also fabricate the plate-laminated waveguide slot array antennas (Y.Miura, J.Hirokawa et al., IEEE Trans. Antennas Propagat., 59, 2011, pp.2844-2851) and show the measured results in the conference.

Original language	English
Title of host publication	2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9789090086286
DOIs	https://doi.org/10.1109/URSI-AT-RASC.2015.7302839
Publication status	Published - 2015 Oct 21
Event	1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015 - Gran Canaria, Spain Duration: 2015 May 16 → 2015 May 24

Publication series

Name	2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015

Other

Other	1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
Country/Territory	Spain
City	Gran Canaria
Period	15/5/16 → 15/5/24

ASJC Scopus subject areas

Communication
Computer Networks and Communications

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10.1109/URSI-AT-RASC.2015.7302839

Cite this

Hirokawa, J., Suetsugu, S., Minamikata, Y., Nagatsuma, T., Seto, H., Inoue, Y., & Saito, M. (2015). Fabrication of plate-laminated waveguide for 350GHz band by silicon process. In 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015 [7302839] (2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/URSI-AT-RASC.2015.7302839

Fabrication of plate-laminated waveguide for 350GHz band by silicon process. / Hirokawa, Jiro; Suetsugu, Satoshi; Minamikata, Yusuke et al.

2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 7302839 (2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hirokawa, J, Suetsugu, S, Minamikata, Y, Nagatsuma, T, Seto, H, Inoue, Y & Saito, M 2015, Fabrication of plate-laminated waveguide for 350GHz band by silicon process. in 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015., 7302839, 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015, Institute of Electrical and Electronics Engineers Inc., 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015, Gran Canaria, Spain, 15/5/16. https://doi.org/10.1109/URSI-AT-RASC.2015.7302839

Hirokawa J, Suetsugu S, Minamikata Y, Nagatsuma T, Seto H, Inoue Y et al. Fabrication of plate-laminated waveguide for 350GHz band by silicon process. In 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015. Institute of Electrical and Electronics Engineers Inc. 2015. 7302839. (2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015). doi: 10.1109/URSI-AT-RASC.2015.7302839

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abstract = "This paper presents the fabrication of plate-laminated waveguides and cavities for 350GHz band by silicon process where the tolerance is less than several μm. We measure the transmission loss of the waveguide and the Q factors of the cavities, and then estimate the equivalent conductivity. We will also fabricate the plate-laminated waveguide slot array antennas (Y.Miura, J.Hirokawa et al., IEEE Trans. Antennas Propagat., 59, 2011, pp.2844-2851) and show the measured results in the conference.",

author = "Jiro Hirokawa and Satoshi Suetsugu and Yusuke Minamikata and Tadao Nagatsuma and Hiroyuki Seto and Yoshiyuki Inoue and Mikiko Saito",

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AB - This paper presents the fabrication of plate-laminated waveguides and cavities for 350GHz band by silicon process where the tolerance is less than several μm. We measure the transmission loss of the waveguide and the Q factors of the cavities, and then estimate the equivalent conductivity. We will also fabricate the plate-laminated waveguide slot array antennas (Y.Miura, J.Hirokawa et al., IEEE Trans. Antennas Propagat., 59, 2011, pp.2844-2851) and show the measured results in the conference.

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Fabrication of plate-laminated waveguide for 350GHz band by silicon process

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