Fabrication of polymer and metal three-dimensional micromesh structures

Hironobu Sato, Yoshitaka Houshi, Toshiharu Otsuka, Shuichi Shoji

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

This paper presents the fabrication methods of polymer and metal three-dimensional (3-D) micromesh structures. The photoresist micromesh structures were formed using multiple inclined UV exposure from the backside of the SU-8 coated glass substrate with metal patterns. A few micrometer-size pillars and pores were realized by optimizing the UV lithography conditions. The 3-D macroporous-mesh Ni structures were also fabricated using electroplating. The inverse-mesh photoresist structures, fabricated by multiple inclined backside exposure, were used as molds for Ni electroplating. Ni meshes of about 3 μm in diameter were obtained by this method.

Original languageEnglish
Pages (from-to)8341-8344
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume43
Issue number12
DOIs
Publication statusPublished - 2004 Dec 1

Keywords

  • 3-D micromesh structures
  • Electroplating
  • Multiple inclined UV exposure
  • Photoresist molds
  • SU-8

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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