Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography

T. Kamibayashi, Hiroyuki Kuwae, A. Nobori, Shuichi Shoji, Jun Mizuno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We proposed a novel fabrication method of a pillar patterned self-standing curved film by spherical soft-UV imprint lithography. Soft-UV imprint lithography was performed using a patterned polydimethylsiloxane (PDMS) mold and a convex mold in order to pattern pillar onto large curved film. A mother patterned mold of spherical soft UV imprint lithography was prepared by unique 3D printer method. The curved film with the pillar pattern was successfully fabricated with a curvature radius of 40 mm. The proposed method is useful for 3D-structured fabrication of the optical devices.

Original languageEnglish
Title of host publication2017 International Conference on Electronics Packaging, ICEP 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages148-151
Number of pages4
ISBN (Electronic)9784990218836
DOIs
Publication statusPublished - 2017 Jun 5
Event2017 International Conference on Electronics Packaging, ICEP 2017 - Tendo, Yamagata, Japan
Duration: 2017 Apr 192017 Apr 22

Other

Other2017 International Conference on Electronics Packaging, ICEP 2017
CountryJapan
CityTendo, Yamagata
Period17/4/1917/4/22

Keywords

  • 3D fabrication
  • curved surface
  • optical devices
  • self-standing film
  • soft-UV imprint

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Kamibayashi, T., Kuwae, H., Nobori, A., Shoji, S., & Mizuno, J. (2017). Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography. In 2017 International Conference on Electronics Packaging, ICEP 2017 (pp. 148-151). [7939344] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/ICEP.2017.7939344