Fabrication of semiconductor tactile imager

Masayoshi Esashi, Shuichi Shoji, Akira Yamamoto, Katsutoshi Nakamura

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

To realize a robot with a high degree of functions, pressure sensors are essential. In particular, a tactile imager with a high density of pressure sensors must be developed. To efficiently withdraw information from numerous sensors and to minimize wirings from the sensors, it is necessary to install a switching circuit on each sensor. For these reasons, a semiconductor sensor is the most suitable. In this study, we fabricated a semiconductor tactile imager with 64 silicon piezo-electric pressure sensors on a flexible substrate. Although all 64 sensors did not function, the basic characteristics and efficiency of the device were evaluated.

Original languageEnglish
Pages (from-to)97-104
Number of pages8
JournalElectronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi)
Volume73
Issue number11
Publication statusPublished - 1990 Nov
Externally publishedYes

Fingerprint

Image sensors
Semiconductor materials
Fabrication
Pressure sensors
pressure sensors
fabrication
sensors
Sensors
Switching circuits
switching circuits
wiring
Electric wiring
robots
Robots
Silicon
silicon
Substrates

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Fabrication of semiconductor tactile imager. / Esashi, Masayoshi; Shoji, Shuichi; Yamamoto, Akira; Nakamura, Katsutoshi.

In: Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi), Vol. 73, No. 11, 11.1990, p. 97-104.

Research output: Contribution to journalArticle

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