Fabrication of silicon mold for thermal nanoimprint lithography

J. Matsui, H. Takahashi, N. Xie, J. Mizuno, K. Utaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We fabricated a silicon mold for thermal Nanoimprint Lithography (NIL) with EB exposure and Deep-RIE. As a result, we obtained that including a grating whose pitch was 230nm with low roughness.

Original languageEnglish
Title of host publication2008 Int. Nano-Optoelectronics Workshop, iNOW 2008 in Cooperation With Int. Global-COE Summer School (Photonics Integration-Core Electronics
Subtitle of host publicationPICE) and 31st Int. Symposium on Optical Communications
Pages267-268
Number of pages2
DOIs
Publication statusPublished - 2008 Nov 26
Event2008 International Nano-Optoelectronics Workshop, iNOW 2008 in Cooperation With International Global-COE Summer School (Photonics Integration-Core Electronics: PICE) and 31st International Symposium on Optical Communications - Tokyo, Lake Saiko, Shanon Village, Japan
Duration: 2008 Aug 22008 Aug 15

Publication series

Name2008 Int. Nano-Optoelectronics Workshop, iNOW 2008 in Cooperation With Int. Global-COE Summer School (Photonics Integration-Core Electronics: PICE) and 31st Int. Symposium on Optical Communications

Conference

Conference2008 International Nano-Optoelectronics Workshop, iNOW 2008 in Cooperation With International Global-COE Summer School (Photonics Integration-Core Electronics: PICE) and 31st International Symposium on Optical Communications
CountryJapan
CityTokyo, Lake Saiko, Shanon Village
Period08/8/208/8/15

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering

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  • Cite this

    Matsui, J., Takahashi, H., Xie, N., Mizuno, J., & Utaka, K. (2008). Fabrication of silicon mold for thermal nanoimprint lithography. In 2008 Int. Nano-Optoelectronics Workshop, iNOW 2008 in Cooperation With Int. Global-COE Summer School (Photonics Integration-Core Electronics: PICE) and 31st Int. Symposium on Optical Communications (pp. 267-268). [4634540] (2008 Int. Nano-Optoelectronics Workshop, iNOW 2008 in Cooperation With Int. Global-COE Summer School (Photonics Integration-Core Electronics: PICE) and 31st Int. Symposium on Optical Communications). https://doi.org/10.1109/INOW.2008.4634540