Fabrication of Sputtered Low-strain, Low-loss SiN Waveguide for Optical Phased Array Device

Masaki Nishimura, Hayato Takemura, Toshimasa Umezawa, Wittawat Yamwong, Tetsuya Kawanishi, Naokatsu Yamamoto, Nipapan Klunngien

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Chemical Compounds

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Physics & Astronomy