Fabrication of sub-100 nm wires in GaAs/AlGaAs multiquantum well by focused ion beam lithography

H. Arimoto, H. Kitada, A. Tackeuchi, A. Endho, Y. Yamaguchi, S. Muto

Research output: Contribution to conferencePaperpeer-review

2 Citations (Scopus)

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Engineering & Materials Science