Fabrication of the 3-D SU-8 fine micromesh and electroplated Ni micromesh structures

Hironobu Sato, Yoshitaka Houshi, Toshiharu Otsuka, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    This paper presents fabrication of the 3-D SU-8 fine micromesh structure and electroplated Ni micromesh structure. The SU-8 mesh structures were formed using multiple inclined UV exposure from backside of the SU-8 coated glass substrate with metal patterns. A few μm size pillars and pores were realized by optimizing the UV lithography conditions. The 3-D micromesh Ni structures were also fabricated using electroplating. The inverse-mesh photoresist structures, fabricated by multiple inclined backside exposure, were used as molds for Ni electroplating. Ni meshes of about 3μm in diameter were obtained by this method.

    Original languageEnglish
    Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2004
    Pages304-305
    Number of pages2
    Publication statusPublished - 2004
    Event2004 International Microprocesses and Nanotechnology Conference - Osaka
    Duration: 2004 Oct 262004 Oct 29

    Other

    Other2004 International Microprocesses and Nanotechnology Conference
    CityOsaka
    Period04/10/2604/10/29

    Fingerprint

    Electroplating
    Fabrication
    Molds
    Photoresists
    Lithography
    Glass
    Substrates
    Metals

    ASJC Scopus subject areas

    • Engineering(all)

    Cite this

    Sato, H., Houshi, Y., Otsuka, T., & Shoji, S. (2004). Fabrication of the 3-D SU-8 fine micromesh and electroplated Ni micromesh structures. In Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 304-305)

    Fabrication of the 3-D SU-8 fine micromesh and electroplated Ni micromesh structures. / Sato, Hironobu; Houshi, Yoshitaka; Otsuka, Toshiharu; Shoji, Shuichi.

    Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 304-305.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Sato, H, Houshi, Y, Otsuka, T & Shoji, S 2004, Fabrication of the 3-D SU-8 fine micromesh and electroplated Ni micromesh structures. in Digest of Papers - Microprocesses and Nanotechnology 2004. pp. 304-305, 2004 International Microprocesses and Nanotechnology Conference, Osaka, 04/10/26.
    Sato H, Houshi Y, Otsuka T, Shoji S. Fabrication of the 3-D SU-8 fine micromesh and electroplated Ni micromesh structures. In Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 304-305
    Sato, Hironobu ; Houshi, Yoshitaka ; Otsuka, Toshiharu ; Shoji, Shuichi. / Fabrication of the 3-D SU-8 fine micromesh and electroplated Ni micromesh structures. Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. pp. 304-305
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