Fabrication of the electroless NiMoB films as a diffusion barrier layer on the low-k substrate

Masahiro Yoshino, Toyoto Masuda, Satoshi Wakatsuki, Junji Sasano, Itsuaki Matsuda, Yosi Shacham-Diamand, Tetsuya Osaka

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

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Engineering & Materials Science