TY - GEN
T1 - Fabrication of the functional 3-D micromesh structures coated with TiO 2 particles and biocatalyst
AU - Keino, Satoshi
AU - Matsumura, Hirokazu
AU - Ishioka, Masao
AU - Sato, Hironobu
AU - Shoji, Shuichi
PY - 2007/12/1
Y1 - 2007/12/1
N2 - This paper presents the fabrication method of the functional 3-D micromesh structures coated with TiO2 particles and biocatalyst for high efficient microreactors. The micromesh structures are useful as a micro reaction space because of their large surface area. The TiO2-fixed SU-8 micromesh structures were formed by coating the SU-8/TiO2 mixture on the surface of the SU-8 micromeshes (Fig. 1(a)). The biocatalyst-immobilized micromeshes were also formed by coating the biocatalyst/polymer mixture using UV irradiation through the concentric circle patterns (Fig. 1(b)).
AB - This paper presents the fabrication method of the functional 3-D micromesh structures coated with TiO2 particles and biocatalyst for high efficient microreactors. The micromesh structures are useful as a micro reaction space because of their large surface area. The TiO2-fixed SU-8 micromesh structures were formed by coating the SU-8/TiO2 mixture on the surface of the SU-8 micromeshes (Fig. 1(a)). The biocatalyst-immobilized micromeshes were also formed by coating the biocatalyst/polymer mixture using UV irradiation through the concentric circle patterns (Fig. 1(b)).
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U2 - 10.1109/IMNC.2007.4456333
DO - 10.1109/IMNC.2007.4456333
M3 - Conference contribution
AN - SCOPUS:47349123485
SN - 4990247248
SN - 9784990247249
T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
SP - 520
EP - 521
BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Y2 - 5 November 2007 through 8 November 2007
ER -