Fabrication of the functional 3-D micromesh structures coated with TiO 2 particles and biocatalyst

Satoshi Keino, Hirokazu Matsumura, Masao Ishioka, Hironobu Sato, Shuichi Shoji

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    This paper presents the fabrication method of the functional 3-D micromesh structures coated with TiO2 particles and biocatalyst for high efficient microreactors. The micromesh structures are useful as a micro reaction space because of their large surface area. The TiO2-fixed SU-8 micromesh structures were formed by coating the SU-8/TiO2 mixture on the surface of the SU-8 micromeshes (Fig. 1(a)). The biocatalyst-immobilized micromeshes were also formed by coating the biocatalyst/polymer mixture using UV irradiation through the concentric circle patterns (Fig. 1(b)).

    Original languageEnglish
    Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
    Pages520-521
    Number of pages2
    DOIs
    Publication statusPublished - 2007
    Events20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto
    Duration: 2007 Nov 52007 Nov 8

    Other

    Others20th International Microprocesses and Nanotechnology Conference, MNC 2007
    CityKyoto
    Period07/11/507/11/8

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    ASJC Scopus subject areas

    • Hardware and Architecture
    • Electrical and Electronic Engineering

    Cite this

    Keino, S., Matsumura, H., Ishioka, M., Sato, H., & Shoji, S. (2007). Fabrication of the functional 3-D micromesh structures coated with TiO 2 particles and biocatalyst. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 520-521). [4456333] https://doi.org/10.1109/IMNC.2007.4456333