Fabrication of the functional 3-D micromesh structures coated with TiO 2 particles and biocatalyst

Satoshi Keino, Hirokazu Matsumura, Masao Ishioka, Hironobu Sato, Shuichi Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents the fabrication method of the functional 3-D micromesh structures coated with TiO2 particles and biocatalyst for high efficient microreactors. The micromesh structures are useful as a micro reaction space because of their large surface area. The TiO2-fixed SU-8 micromesh structures were formed by coating the SU-8/TiO2 mixture on the surface of the SU-8 micromeshes (Fig. 1(a)). The biocatalyst-immobilized micromeshes were also formed by coating the biocatalyst/polymer mixture using UV irradiation through the concentric circle patterns (Fig. 1(b)).

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages520-521
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Events20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
Duration: 2007 Nov 52007 Nov 8

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Others20th International Microprocesses and Nanotechnology Conference, MNC 2007
CountryJapan
CityKyoto
Period07/11/507/11/8

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Keino, S., Matsumura, H., Ishioka, M., Sato, H., & Shoji, S. (2007). Fabrication of the functional 3-D micromesh structures coated with TiO 2 particles and biocatalyst. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 520-521). [4456333] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456333