Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure

Daisuke Uchida, Masaki Kanai, Takahiro Nishimoto, Shuichi Shoji

    Research output: Contribution to journalArticle

    4 Citations (Scopus)


    PDMS microstructures whose whole inner surfaces are covered with perfluoro polymer are described. The major problems of PDMS microfluidic devices in Micro Total Analysis Systems (µTAS) applications are surface degradation with organic solvents and unexpected adsorption of chemical materials. In order to overcome these problems, perfluoro amorphous polymer is coated on the PDMS micro structures. This method is useful to realize chemical durability of the PDMS microfluidic devices. And novel method for fabricating metal electrodes on the perfluoro polymer is also proposed.

    Original languageEnglish
    Pages (from-to)364-368
    Number of pages5
    JournalIEEJ Transactions on Sensors and Micromachines
    Issue number10
    Publication statusPublished - 2006


    • CYTOP
    • metal electrode
    • molding
    • PDMS
    • perfluoro amorphous polymer

    ASJC Scopus subject areas

    • Mechanical Engineering
    • Electrical and Electronic Engineering

    Fingerprint Dive into the research topics of 'Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure'. Together they form a unique fingerprint.

  • Cite this