Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography

Koichi Awazu, Makoto Fujimaki, Xiaomin Wang, Akihide Sai, Yoshimichi Ohki

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    4 Citations (Scopus)

    Abstract

    Two dimensional photonic crystals of titanium dioxide is expected to have many advantage compared with photonic crystals of semiconductors, e.g., silicon and GaAs. For example, low optical loss in the near infrared region used for optical communication, low thermal expansion, and its refractive index which is close to that for optical fiber are attractive advantages. However, it is difficult to create micro-nano structure in titanium dioxide because micro-fabrication technique for semiconductor is not available for titanium dioxide. As the first step we calculated photonic band gap of titanium dioxide rod-slab on SiO 2. Also, band gap percent against thickness of the rod-slab was examined. Finally, we confirmed the most suitable structure of 2D photonic crystals. Deep x-ray lithography technique was employed for create a very deep and precise template of PMMA. Then, liquid-phase deposition was used to faithfully deposit a tightly packed layer of titanium oxide onto the template. Finally, the template is selectively removed to obtain a photonic nano-structure. We also calculate photonic band gap on the 3D-structure of TiO 2. A template for the most appropriate structure was fabricated by the method proposed by Yablonovitch. By using of the same method, it was successful to obtain 3D structure of TiO 2. Refractive index of obtained TiO 2 followed by heating at 700°C was determined to 2.5 which is close to that for anatase phase.

    Original languageEnglish
    Title of host publicationMaterials Research Society Symposium Proceedings
    EditorsJ. Liu, D. McIlroy, L. Merhari, J.P. Pendry, J.T. Borenstein, P. Grodzinski, L.P. Lee, Z.L. Wang
    Pages295-300
    Number of pages6
    Volume820
    Publication statusPublished - 2004
    EventNanoengineered Assemblies and Advanced Micro/Nanosystems - San Francisco, CA, United States
    Duration: 2004 Apr 132004 Apr 16

    Other

    OtherNanoengineered Assemblies and Advanced Micro/Nanosystems
    CountryUnited States
    CitySan Francisco, CA
    Period04/4/1304/4/16

    Fingerprint

    Titanium dioxide
    Photonics
    Lithography
    Fabrication
    X rays
    Photonic crystals
    Photonic band gap
    Refractive index
    Semiconductor materials
    Optical losses
    Titanium oxides
    Microfabrication
    Optical communication
    Thermal expansion
    Polymethyl Methacrylate
    Silicon
    Optical fibers
    Energy gap
    Deposits
    titanium dioxide

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials

    Cite this

    Awazu, K., Fujimaki, M., Wang, X., Sai, A., & Ohki, Y. (2004). Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. In J. Liu, D. McIlroy, L. Merhari, J. P. Pendry, J. T. Borenstein, P. Grodzinski, L. P. Lee, ... Z. L. Wang (Eds.), Materials Research Society Symposium Proceedings (Vol. 820, pp. 295-300). [R4.5]

    Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. / Awazu, Koichi; Fujimaki, Makoto; Wang, Xiaomin; Sai, Akihide; Ohki, Yoshimichi.

    Materials Research Society Symposium Proceedings. ed. / J. Liu; D. McIlroy; L. Merhari; J.P. Pendry; J.T. Borenstein; P. Grodzinski; L.P. Lee; Z.L. Wang. Vol. 820 2004. p. 295-300 R4.5.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Awazu, K, Fujimaki, M, Wang, X, Sai, A & Ohki, Y 2004, Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. in J Liu, D McIlroy, L Merhari, JP Pendry, JT Borenstein, P Grodzinski, LP Lee & ZL Wang (eds), Materials Research Society Symposium Proceedings. vol. 820, R4.5, pp. 295-300, Nanoengineered Assemblies and Advanced Micro/Nanosystems, San Francisco, CA, United States, 04/4/13.
    Awazu K, Fujimaki M, Wang X, Sai A, Ohki Y. Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. In Liu J, McIlroy D, Merhari L, Pendry JP, Borenstein JT, Grodzinski P, Lee LP, Wang ZL, editors, Materials Research Society Symposium Proceedings. Vol. 820. 2004. p. 295-300. R4.5
    Awazu, Koichi ; Fujimaki, Makoto ; Wang, Xiaomin ; Sai, Akihide ; Ohki, Yoshimichi. / Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. Materials Research Society Symposium Proceedings. editor / J. Liu ; D. McIlroy ; L. Merhari ; J.P. Pendry ; J.T. Borenstein ; P. Grodzinski ; L.P. Lee ; Z.L. Wang. Vol. 820 2004. pp. 295-300
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